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Coplanar Waveguide Transmission Line

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Book cover RF MEMS Switches and Integrated Switching Circuits

Part of the book series: MEMS Reference Shelf ((MEMSRS,volume 5))

Abstract

The objective of this chapter is to investigate silicon-core (Si-core) metal-coated coplanar waveguide transmission (CPW) line [1]. The Si-core CPW is designed, fabricated, and experimented. Then, attenuation related to different substrate materials, core materials, and fabrication processes are analyzed. The experimental results show that the Si-core CPW supports quasi-TEM mode propagation up to 25 GHz with attenuation less than 4 dB/cm.

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Notes

  1. 1.

    Min Tang, Muhammad Faeyz Karim and Ai Qun Liu

References

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Authors and Affiliations

  1. School of Electrical & Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore, 639798, Singapore

    Dr. Ai Qun Liu

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  1. Dr. Ai Qun Liu
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Correspondence to Ai Qun Liu .

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Liu, A.Q. (2010). Coplanar Waveguide Transmission Line. In: RF MEMS Switches and Integrated Switching Circuits. MEMS Reference Shelf, vol 5. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-46262-2_4

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  • DOI: https://doi.org/10.1007/978-0-387-46262-2_4

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  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-387-46261-5

  • Online ISBN: 978-0-387-46262-2

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