Abstract
For the fabrication of optical and microoptical elements like gratings, lenses, waveguides, zoneplates, computer-generated holograms, and so on, many different fabrication technologies are available. Some of these elements are planar elements; that is, the optical function of such elements is realized by a thin planar layer containing special structures and/or materials. For the fabrication of such elements, lithographic technologies are employed very often.
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© 2004 Springer Science+Business Media New York
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Schnabel, B. (2004). Microlithographic Pattern Generation for Optics. In: Jahns, J., Brenner, KH. (eds) Microoptics. Springer Series in Optical Sciences, vol 97. Springer, New York, NY. https://doi.org/10.1007/978-0-387-34725-7_2
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DOI: https://doi.org/10.1007/978-0-387-34725-7_2
Publisher Name: Springer, New York, NY
Print ISBN: 978-1-4419-1931-1
Online ISBN: 978-0-387-34725-7
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