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Mechanical Design of MEMS Gyroscopes

Chapter
Part of the MEMS Reference Shelf book series (MEMSRS)

Keywords

Proof Mass Sense Direction Sense Electrode Drive Direction Quadrature Signal 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media, LLC 2009

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