Abstract
Piezoresistive transducers are based on the idea that a mechanical input (pressure, force, or acceleration for example) applied to a mechanical structure of some kind (a beam, a plate, or a diaphragm) will cause the structure to experience mechanical strain. Small piezoresistors attached to the structure undergo the same mechanical strain. The resulting deformation causes the piezoresistors– electrical resistance to change, allowing for the transducer to be used as a sensing device.
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References and suggested reading
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Adams, T.M., Layton, R.A. (2010). Piezoresistive transducers. In: Introductory MEMS. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-09511-0_8
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DOI: https://doi.org/10.1007/978-0-387-09511-0_8
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