Abstract
We have learned much about the substrate and ways of adding layers to it. We next turn our attention to creating and transferring patterns onto the substrate and/or these layers. In so doing we lay the foundation of creating actual structures with specific geometries. The primary tool used to accomplish this is photolithography, which is essentially an optical printing process.
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Adams, T.M., Layton, R.A. (2010). Creating and transferring patterns—Photolithography. In: Introductory MEMS. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-09511-0_3
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DOI: https://doi.org/10.1007/978-0-387-09511-0_3
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Online ISBN: 978-0-387-09511-0
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