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Resonant Silicon Microcantilevers for Particle and Gas Sensing

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Piezoelectric Sensors

Part of the book series: Springer Series on Chemical Sensors and Biosensors ((SSSENSORS,volume 18))

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Abstract

Resonant Silicon Microcantilevers (RSMCs) serve as highly suitable Mass-Sensitive Transducers (MSTs) for effective miniaturization, owing to their uncomplicated cantilever device structure and the inherent architectural adaptability of silicon. In comparison with conventional technologies, resonant microcantilevers offer several promising advantages: exceptional sensitivity, cost-effectiveness, robustness, scalability, minimal sample requirements, low energy consumption, rapid response times, and a label-free process devoid of hazards. The extensive research conducted on microcantilever sensors has underscored their versatile analytical capabilities, encompassing the detection of particulate matter in both air and liquids, humidity measurement, and gas sensing applications. This comprehensive chapter presents a thorough exploration of the cutting-edge advancements in microcantilever-based particle and gas sensors. It delves into their underlying working principles, design considerations, the functionalization and packaging of microcantilevers, and the manifold applications they serve, while also shedding light on the future potential in this domain.

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Abbreviations

AFM:

Atomic force microscopy

ALD:

Atomic-layer deposition

APTES:

(3-Aminopropyl)-trimethoxysilane

BAW:

Bulk acoustic wave

CFD:

Computational fluid dynamics

CMOS:

Complementary metal oxide semiconductor

C-MSN:

Carboxyl-group-functionalized mesoporous-silica nanoparticle

CPC:

Condensation particle counter

cryo-DRIE:

Deep reactive ion etching at cryogenic temperature

CSD:

Chemical-solution deposition

CSE:

Chemical-solution etching

CVD:

Chemical vapor deposition

CWA:

Chemical warfare agents

DFP:

Di-isopropyl fluorophosphate

DI:

De-ionized

DMA:

Differential mobility analyzer

DMMP:

Dimethyl methyl phosphonate

DPMS:

Differential mobility particle sizer

EAM:

Electromechanical amplitude modulation

FBAR:

Film bulk acoustic resonator

FMPS:

Fast mobility particle sizer

GND:

Ground

HEPA:

High-efficiency particulate air filter

HR:

Heating resistor

IDLH:

Immediately dangerous for life or health

LOD:

Limit of detection

LPCVD:

Low pressure chemical vapor deposition

MBE:

Molecular-beam epitaxy

MEMS:

Micro electro mechanical system

MOF:

Metal-organic framework

MOS:

Metal oxide semiconducting

MOX:

Metal oxide

MST:

Mass-sensitive transducer

MTF:

Mesoporous thin film

NF:

Nanofin

NPC:

Nanoporous carbon

NPL:

Nanopillar

NR:

Nanorod

OP:

Organophosphorus

OPC:

Optical particle counter

PAAM:

Poly-acryl amide

PCB:

Printed circuit board

PECH:

Polyepichlorohydrin

PECVD:

Plasma enhanced chemical vapor deposition

PEI:

Poly-ethylene imine

PETN:

Pentaerythritol tetranitrate

PLL:

Phase-locked loop

PM:

Particulate matter

PMMA:

Polymethyl methacrylate

PVA:

Poly-vinyl alcohol

PμC:

Piezoresistive microcantilever

μFC:

Microfluidic channel

PVC:

Poly-vinyl chloride

PVD:

Physical vapor deposition

PVP:

Poly-vinyl pyrrolidone

QCM:

Quartz crystal microbalance

RDX:

Hexahydro-1,3,5-triazine

RIE:

Reactive ion etching

RSMC:

Resonant silicon microcantilever

SAM:

Self-assembled monolayer

SAW:

Surface acoustic wave

SEM:

Scanning electron microscopy

TAE:

Tris(hydroxymethyl)aminomethane acetate ethylenediaminetetraacetic acid

TEACl:

Triethylamine hydrochloride

TEOM:

Tapered element oscillating microbalance

TL-FM AFM:

Tipless force modulation atomic force microscopy

TMAH:

Tetramethylammonium hydroxide

TPO:

Thermal-piezoresistive oscillator

TPoS:

Thin-film piezoelectric-on-silicon

TSMR:

Thickness shear mode resonator

TTIP:

Titanium tetraisopropoxide

UFP:

Ultrafine particle

UV:

Ultraviolet

4-MBA:

4-Mercaptobenzoic acid

VOC:

Volatile organic compound

WB:

Wheatstone bridge

WHO:

World Health Organization

ZIF:

Zeolitic-imidazolate-framework

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Acknowledgment

This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union’s Horizon 2020 research and innovation program under No. 19ENG05 Nanowires.

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  1. Institute of Semiconductor Technology (IHT), Technische Universität Braunschweig, Braunschweig, Germany

    Jiushuai Xu

  2. Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Braunschweig, Germany

    Erwin Peiner

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  1. Department of Physical Chemistry, University of Vienna, Vienna, Austria

    Peter Lieberzeit

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Xu, J., Peiner, E. (2023). Resonant Silicon Microcantilevers for Particle and Gas Sensing. In: Lieberzeit, P. (eds) Piezoelectric Sensors. Springer Series on Chemical Sensors and Biosensors, vol 18. Springer, Cham. https://doi.org/10.1007/5346_2023_33

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