Technology and Application Opportunities for SiC-FET Gas Sensors

  • A. Lloyd Spetz
  • M. Andersson
Part of the Springer Series on Chemical Sensors and Biosensors book series (SSSENSORS, volume 11)


The development of SiC-FET gas sensors has proceeded for about fifteen years. The maturity of the SiC material and a deeper understanding of the transduction mechanisms and sensor surface processes behind the sensitivity to a number of target substances have recently allowed the development of market-ready sensors for certain applications. Some examples presented below are a sensor system for domestic boiler control, an ammonia sensor for control of the SCR (selective catalytic reduction) and SNCR (Selective Non-Catalytic Reduction) NO x abatement processes as well as other more or less market-ready applications. In parallel, the basic research continues in order to reach more demanding markets/new applications and also to possibly lower the production costs of the sensors. Therefore, current research and future challenges are also treated, such as the development of new types of conducting ceramics for ohmic contacts to SiC in order to increase the operation temperature beyond the present state of the art.


Catalytic metals Combustion control Exhaust gases FET sensors Flue gases 



Financial support is acknowledged from VINNOVA, The Swedish Agency for Innovation Systems, Industrial Partners and Linköping University through the VINN Excellence Center FunMat, Functional Nanoscale Materials, at Linköping University, Sweden and from S-SENCE, Swedish Sensor Center, VINNOVA Excellence Center at Linköping University 1995–2005, and from the Swedish Research Council.


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© Springer-Verlag Berlin Heidelberg 2011

Authors and Affiliations

  1. 1.Department of Physics, Chemistry and BiologyLinköping UniversityLinköpingSweden
  2. 2.SenSiC ABKistaSweden

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