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Sputtering yields of single crystalline targets

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Sputtering by Particle Bombardment I

Part of the book series: Topics in Applied Physics ((TAP,volume 47))

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Additional References with Titles Chapter 1

  1. E. Taglauer, W. Heiland: Inelastic Particle-Surface Collisions, Springer Series in Chemical Physics, Vol. 17, (Springer, Berlin, Heidelberg, New York 1981) Chapter 3

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Authors
  1. Hans E. Roosendaal
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Rainer Behrisch

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Roosendaal, H.E. (1981). Sputtering yields of single crystalline targets. In: Behrisch, R. (eds) Sputtering by Particle Bombardment I. Topics in Applied Physics, vol 47. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3540105212_10

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