Abstract
Micro-cantilever based devices can be used to investigate and manipulate matter at atomic scales. Taking the case study of atomic force microscope (AFM) we demonstrate the power of system tools in the analysis of micro-cantilever based devices. They capture important characteristics and predict inherent limitations in the operation of these devices. Such a systems approach is shown to complement the physical studies performed on these devices. Tractable models are developed for the AFM operating in tapping-mode. For the interrogation of samples, it is also imperative that sample positioning should be done with high precision and at high speeds. This broadband nanopositioning problem is shown to fit into the modern robust control framework. This is illustrated by the design, identification and control of such a positioning device.
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Sebastian, A., Salapaka, S., Salapaka, M.V. (2003). System tools applied to micro-cantilever based devices. In: Giarré, L., Bamieh, B. (eds) Multidisciplinary Research in Control. Lecture Notes in Control and Information Sciences, vol 289. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-36589-3_7
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DOI: https://doi.org/10.1007/3-540-36589-3_7
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