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Effects of defects on electrophysical and functional parameters in semiconducting structures and devices

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Book cover Gettering Defects in Semiconductors

Part of the book series: Springer Series in Advanced Microelectronics ((MICROELECTR.,volume 19))

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© 2005 Springer Berlin Heidelberg

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(2005). Effects of defects on electrophysical and functional parameters in semiconducting structures and devices. In: Gettering Defects in Semiconductors. Springer Series in Advanced Microelectronics, vol 19. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-29499-6_3

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