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Nanomechanical Cantilever Devices for Biological Sensors

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Micromanufacturing and Nanotechnology

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  1. Microsystem Research Center, Korean Institute of Science and Technology, Seoul, 136-791, Korea, Democratic People’s Republic of

    Tae Song Kim, Jeong Hoon Lee & Dae Sung Yoon

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  1. Tae Song Kim
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Kim, T.S., Lee, J.H., Yoon, D.S. (2006). Nanomechanical Cantilever Devices for Biological Sensors. In: Micromanufacturing and Nanotechnology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-29339-6_13

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