Conclusion
From the DH analysis we have found an asymmetric behavior of the device, probably due to impurities presence in the air gap between the bride an substrate. These results show all potentialities of this non destructive inspection method, that it promise to have a very important role in the futures processes of dynamic MEMS characterization.
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© 2006 Springer-Verlag Berlin Heidelberg
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Striano, V. et al. (2006). Digital holographic microscope for dynamic characterization of a micromechanical shunt switch. In: Osten, W. (eds) Fringe 2005. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-29303-5_89
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DOI: https://doi.org/10.1007/3-540-29303-5_89
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