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Multichannel Ellipsometry

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Handbook of Ellipsometry

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Author information

Authors and Affiliations

  1. Department of Physics and Astronomy, The University of Toledo, Toledo

    Robert W. Collins

  2. Department of Physics and Materials Research Institute, The Pennsylvania State University, USA

    Ilsin An, Joungchel Lee & Juan A. Zapien

Authors
  1. Robert W. Collins
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  2. Ilsin An
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  3. Joungchel Lee
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  4. Juan A. Zapien
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Editor information

Editors and Affiliations

  1. Chandler, Arizona

    Harland G. Tompkins (Thin Films Materials Science Consultant) (Thin Films Materials Science Consultant)

  2. Department of Chemistry, University of North Carolina, Chapel Hill, North Carolina

    Eugene A. Irene

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Collins, R.W., An, I., Lee, J., Zapien, J.A. (2005). Multichannel Ellipsometry. In: Tompkins, H.G., Irene, E.A. (eds) Handbook of Ellipsometry. Springer, Berlin, Heidelberg . https://doi.org/10.1007/3-540-27488-X_7

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