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Rotating Polarizer and Analyzer Ellipsometry

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Handbook of Ellipsometry

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5.8 References

  1. R.M.A. Azzam and N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam (1977).

    Google Scholar 

  2. H.G. Tompkins, A User’s Guide to Ellipsometry, Academic Press, New York (1992).

    Google Scholar 

  3. E. Passaglia, R.R. Stromberg, and J. Kruger, eds., Ellipsometry in the Measurement of Surfaces and Thin Films, NBS, Washington DC (1964), published as National Bureau of Standards Miscellaneous Publication 256.

    Google Scholar 

  4. N.M. Bashara, A.B. Buckman, and A.C. Hall, eds., Proceedings of the Symposium on Recent Developments in Ellipsometry, North-Holland, Amsterdam (1969); published as Surf Sci., 16 (1969).

    Google Scholar 

  5. N.M. Bashara and R.M.A. Azzam, eds., Proceedings of the Third International Conference on Ellipsometry, North-Holland, Amsterdam (1976); published as Surf. Sci., 56 (1976).

    Google Scholar 

  6. R.H. Muller, R.M.A. Azzam, and D.E. Aspnes, eds., Proceedings of the Fourth International Conference on Ellipsometry, North-Holland, Amsterdam (1980); published as Surf. Sci., 96 (1980).

    Google Scholar 

  7. D.E. Aspnes in: Optical Properties of Solids: New Developments, edited by B.O. Seraphin, North-Holland, Amsterdam (1976), p. 799.

    Google Scholar 

  8. E.A. Irene and YJ. van der Meulen, J. Electrochem Soc., 123, 1380 (1976).

    Article  CAS  Google Scholar 

  9. J.B. Theeten, F. Hottier, and J. Hallais, J. Cryst. Growth, 46, 245 (1979).

    Article  CAS  Google Scholar 

  10. B.D. Cahan and R.F. Spanier, Surf. Sci., 16, 166 (1969).

    Article  Google Scholar 

  11. D.E. Aspnes and A.A. Studna, Appl. Opt., 14, 220 (1975).

    CAS  Google Scholar 

  12. J.B. Theeten, F. Simondet, M. Erman, and J. Pernas, Proceedings of the Fourth International Conference on Solid Surfaces, Cannes, 1980, in: Le Vide, Les Couches Minces Suppl., 201, 1071 (1980).

    Google Scholar 

  13. S.N. Jasperson and S.E. Schnatterly, Rev. Sci. Instrum., 40, 761 (1969).

    Article  Google Scholar 

  14. V.M. Bermudez and V.H. Ritz, Appl. Opt., 17, 542 (1978).

    CAS  Google Scholar 

  15. J.L. Ord, Surf. Sci., 16, 155 (1969).

    Article  Google Scholar 

  16. H.J. Mathieu, D.E. McClure, and R.H. Muller, Rev. Sci. Instrum., 45, 798 (1974).

    Article  Google Scholar 

  17. R.H. Muller and J.C. Farmer, Rev. Sci. Instrum., 55, 371 (1984).

    Article  CAS  Google Scholar 

  18. B. Drevillon, J. Perrin, R. Marbot, A. Violet, and J.L. Dalby, Rev. Sci. Instrum., 53, 969 (1982).

    Article  CAS  Google Scholar 

  19. W.M. Duncan and S.A. Henck, Appl. Surf. Sci., 63, 9 (1993).

    Article  CAS  Google Scholar 

  20. P.S. Hauge and F.H. Dill, IBM J. Res. Develop., 17, 472 (1973).

    Article  Google Scholar 

  21. R.W. Collins, Rev. Sci. Instrum., 61, 2029 (1990).

    Article  CAS  Google Scholar 

  22. D.E. Aspnes, Appl. Opt., 14, 1131 (1975).

    CAS  Google Scholar 

  23. G.E. Jellison, Jr., and F.A. Modine, Appl. Opt., 29, 959 (1990).

    CAS  Google Scholar 

  24. D.E. Aspnes, J. Opt. Soc. Am., 64, 639 (1974).

    Google Scholar 

  25. J.A. Woollam, B. Johs, CM. Herzinger, J.N. Hilfiker, R. Synowicki, and C. Bungay, Proc. Soc. Photo-Opt. Instrum. Eng., Crit. Rev., 72, 3 (1999); B. Johs, J.A. Woollam, CM. Herzinger, J.N. Hilfiker, R. Synowicki, and C Bungay, Proc. Soc. Photo-Opt. Instrum. Eng., Crit. Rev., 72, 29 (1999).

    Google Scholar 

  26. J. Lee, P.I. Rovira, I. An, and R.W. Collins, J. Opt. Soc. Am. A, 18, 1980 (2001).

    CAS  Google Scholar 

  27. O. Archer, E. Bigan, and B. Drevillon, Rev. Sci. Instrum., 60, 65 (1989).

    Article  Google Scholar 

  28. D.E. Aspnes and A.A. Studna, Phys. Rev., B, 27, 985 (1983).

    Article  CAS  Google Scholar 

  29. A.C. Boccara, C Pickering, and J. Rivory, eds., Proceedings of the First International Conference on Spectroscopic Ellipsometry, Elsevier, Amsterdam, (1993); published as Thin Solid Films, 233–234 (1993).

    Google Scholar 

  30. R.W. Collins, D.E. Aspnes, and E.A. Irene, eds., Proceedings of the Second International Conference on Spectroscopic Ellipsometry, Elsevier, Amsterdam, (1998); published as Thin Solid Films, 313–314 (1998).

    Google Scholar 

  31. A. Moritani and J. Nakai, Appl. Opt., 21, 3231 (1982).

    CAS  Google Scholar 

  32. B. Drevillon, Prog. Cryst. Growth Charact. Mater., 27, 1 (1993).

    Article  CAS  Google Scholar 

  33. J. Costa, J. Campmany, A. Canillas, J.L. Andujar, and E. Bertan, Rev. Sci. Instrum., 68,3135 (1997).

    Article  CAS  Google Scholar 

  34. I. An, Y. M. Li, H.V. Nguyen, and R. W. Collins, Rev. Sci. Instrum., 63, 3842 (1992).

    Article  CAS  Google Scholar 

  35. J.C. Farmer and R.H. Muller, J. Electrochem. Soc., 132, 313 (1985).

    Article  CAS  Google Scholar 

  36. S.T. Mayer and R.H. Muller, J. Electrochem. Soc., 135, 2133 (1988).

    Article  CAS  Google Scholar 

  37. J.M. Bennett and H.E. Bennett in: Handbook of Optics, edited by W.G. Driscoll, McGraw-Hill, New York (1978), Chapt. 10.

    Google Scholar 

  38. P. Chindaudom and K. Vedam in: Optical Characterization of Real Films and Surfaces, edited by K. Vedam, Academic, New York (1994), p. 191.

    Google Scholar 

  39. H.G. Tompkins, in: this Handbook, Chapt. 4.

    Google Scholar 

  40. J.A. Zapien, R.W. Collins, and R. Messier, Rev. Sci. Instrum., 71, 3451 (2000).

    Article  CAS  Google Scholar 

  41. N.V. Nguyen, B.S. Pudliner, I. An, and R.W. Collins, J. Opt. Soc. Am. A, 8, 919(1991).

    Google Scholar 

  42. S.H. Russev, Appl. Opt., 28, 1504 (1989).

    Google Scholar 

  43. M. Ebert and D.E. Aspnes, Rev. Sci. Instrum., 72, 3477 (2001).

    Article  CAS  Google Scholar 

  44. I. An and R.W. Collins, Rev. Sci. Instrum., 62, 1904 (1991).

    Article  Google Scholar 

  45. S.D. Yoo, N.V. Edwards, and D.E. Aspnes, Thin Solid Films, 313–314, 143 (1998).

    Article  Google Scholar 

  46. D.E. Aspnes, J. Opt. Soc. Am., 64, 812 (1974).

    CAS  Google Scholar 

  47. R.J. King and M.J. Downs, Surf. Sci., 16, 288 (1969).

    Article  CAS  Google Scholar 

  48. J.R. Zeidler, R.B. Kohles, and N.M. Bashara, Appl. Opt., 13, 1115 (1974).

    CAS  Google Scholar 

  49. R.W. Collins, Proc. Soc. Photo-Opt. Instrum. Eug., 617, 62 (1986).

    CAS  Google Scholar 

  50. A.A. Studna, D.E. Aspnes, L.T. Florez, B.J. Wilkens, J.P. Harbison, and R.E. Ryan, J. Vac. Sci. Technol. B, 7, 3291 (1989).

    Article  CAS  Google Scholar 

  51. G. Laurence, F. Hottier, and J. Hallais, Rev. Phys. Appl. (Paris), 16, 579 (1981).

    CAS  Google Scholar 

  52. W. Budde, Appl. Opt., 1, 201 (1962).

    Google Scholar 

  53. R.W. Collins, I. An, J. Lee, and J.A. Zapien, in: this Handbook, Chapter 7.

    Google Scholar 

  54. D.E. Aspnes and A.A. Studna, Rev. Sci. Instrum., 49, 291 (1978).

    Article  CAS  Google Scholar 

  55. R.H. Muller, in Advances in Electrochemistry and Electrochemical Engineering, Vol. 9, edited by R.H. Muller, Wiley, New York (1973), p. 167.

    Google Scholar 

  56. F.L. McCrackin, J. Opt. Soc. Am., 60, 57 (1970).

    Google Scholar 

  57. D. Chandler-Horowitz and G.A. Candela, Appl. Opt., 21, 2972 (1982).

    CAS  Google Scholar 

  58. M. Yamamoto and O.S. Heavens, Surf. Sci., 96, 202 (1980).

    Article  CAS  Google Scholar 

  59. J.A. Woollam and P.G. Snyder, Mater. Sci. Eng. B, 5, 279 (1990).

    Article  Google Scholar 

  60. K. Vedam, P.J. McMarr, and J. Narayan, Appl. Phys. Lett., 47, 339 (1985).

    Article  CAS  Google Scholar 

  61. Y.J. van der Meulen and N.C. Hien, J. Opt. Soc. Am., 64, 804 (1974).

    Google Scholar 

  62. B. Johs, Thin Solid Films, 234, 395 (1993).

    Article  CAS  Google Scholar 

  63. J.M.M. de Nijs, A.H.M. Holtslag, A. Hoeksta and A. van Silfhout, J. Opt. Soc. Am. A, 5, 1466(1988).

    Google Scholar 

  64. I. An, J. Lee, B. Hong, and R.W. Collins, Thin Solid Films, 313–314, 79 (1998).

    Article  Google Scholar 

  65. G.E. Jellison, Jr., Appl. Opt., 30, 3354 (1991).

    Google Scholar 

  66. C. Chen, I. An, and R.W. Collins, unpublished data.

    Google Scholar 

  67. W.R. Hunter, J. Opt. Soc. Am., 66, 94 (1976).

    Article  Google Scholar 

  68. D.E. Aspnes, Opt. Commun., 8, 222 (1973).

    Article  CAS  Google Scholar 

  69. M. Schubert, Phys. Rev. B, 53, 4265 (1996).

    Article  CAS  Google Scholar 

  70. P.S. Hauge, Surf. Sci., 56, 148 (1976).

    Article  CAS  Google Scholar 

  71. J. Lee, P.I. Rovira, I. An, and R.W. Collins, Rev. Sci. Instrum., 69, 1800 (1998).

    Article  CAS  Google Scholar 

  72. R.W. Collins and J. Koh, J. Opt. Soc. Am. A, 16,1997 (1999); J. Lee, J. Koh, and R.W. Collins, Rev. Sci. Instrum., 72, 1742 (2001).

    Google Scholar 

  73. E. Franke, C.L. Trimble, M.J. DeVries, J.A. Woollam, M. Schubert, and F. Frost, J. Appl. Phys., 88, 5166 (2000).

    Article  CAS  Google Scholar 

  74. O.P.A. Lindquist, K. Jarrendahl, S. Peters, J.T. Zettler, C. Cobet, N. Esser, D.E. Aspnes, A. Henry, and N.V. Edwards, Appl. Phys. Lett., 78, 2715 (2001).

    Article  CAS  Google Scholar 

  75. A. Roeseler, Infrared Spectroscopic Ellipsometry, Akademie, Berlin (1990).

    Google Scholar 

  76. T.E. Tiwald, D.W. Thompson, J.A. Woollam, and S.V. Pepper, Thin Solid Films, 313–314, 718 (1998).

    Article  Google Scholar 

  77. B. Drevillon, Thin Solid Films, 313–314, 625 (1998).

    Article  Google Scholar 

  78. M. Erman and J.B. Theeten,J. Appl. Phys., 60, 859(1986).

    Article  CAS  Google Scholar 

  79. R.F. Cohn, J.W. Wagner, and J. Kruger, Appl. Opt., 27, 4664 (1988).

    Article  CAS  Google Scholar 

  80. A. Michaelis and M. Schweinsberg, Thin Solid Films, 313–314, 756 (1998).

    Article  Google Scholar 

  81. C. Pickering, J. Russell, V. Nayar, J. Imschweiler, H. Wille, S. Harrington, C. Wiggins, J.-L. Stehle, J.-P. Piel, J. Bruchez, Thin Solid Films, 313–314, 446 (1998).

    Article  Google Scholar 

  82. R.W. Collins, I. An, H. Fujiwara, J. Lee, Y. Lu, J. Koh, and P.I. Rovira, Thin Solid Films, 313–314, 18 (1998).

    Article  Google Scholar 

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Collins, R.W., An, I., Chen, C. (2005). Rotating Polarizer and Analyzer Ellipsometry. In: Tompkins, H.G., Irene, E.A. (eds) Handbook of Ellipsometry. Springer, Berlin, Heidelberg . https://doi.org/10.1007/3-540-27488-X_5

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