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© 2005 Springer-Verlag Berlin Heidelberg
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(2005). Introduction. In: Baltes, H., Fujita, H., Liepmann, D. (eds) Integrated Chemical Microsensor Systems in CMOS Technology. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-27372-7_1
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DOI: https://doi.org/10.1007/3-540-27372-7_1
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-23782-2
Online ISBN: 978-3-540-27372-1
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