Advertisement

Fabrication of Nanometer-Scale Structures by Local Oxidation Nanolithography

  • Marta Tello
  • Fernando García
  • Ricardo García
Part of the NanoScience and Technology book series (NANO)

Keywords

Atomic Force Microscope Scanning Tunneling Microscope Oxidation Time Coulomb Blockade Local Oxidation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Binnig G, Rohrer H (1982) Helv Phys Acta 55:726Google Scholar
  2. 2.
    Binnig G, Quate CF, Gerber Ch (1986) Phys Rev Lett 5556:930CrossRefGoogle Scholar
  3. 3.
    Eigler DM, Schweizer EK (1990) Nature 344:524CrossRefGoogle Scholar
  4. 4.
    Dagata JA, Schneir J, Harary HH, Evans CJ, Postek MT, Bennet J (1990) Appl Phys Lett 56:2001CrossRefGoogle Scholar
  5. 5.
    Lyo IW, Avouris P (1991) Science 253:173Google Scholar
  6. 6.
    García R (1994) Appl Phys Lett 64:1162CrossRefGoogle Scholar
  7. 7.
    Quate CF (1997) Surf Sci 980:299–300Google Scholar
  8. 8.
    Binnig H, Rohrer H (1999) Rev Mod Phys 71:S324CrossRefGoogle Scholar
  9. 9.
    García R (2002) Alternative Lithography. Kluwer/Plenum, New YorkGoogle Scholar
  10. 10.
    Wouters D, Schubert US (2004) Angew Chem Int Ed 43:2480CrossRefGoogle Scholar
  11. 11.
    Colton RJ, Engel A, Frommer JE, Gaub HE, Gewirth AA, Guckenberger R, Rabe J, Heckl WM, Parkinson B (1998) Procedures in Scanning Probe Microscopies. Wiley, New YorkGoogle Scholar
  12. 12.
    Wendel M, Lorenz H, Kotthaus JP (1995) Appl Phys Lett 67:3732CrossRefGoogle Scholar
  13. 13.
    Mamin HJ, Rugar D (1992) Appl Phys Lett 61:1003CrossRefGoogle Scholar
  14. 14.
    Binnig G, Despont M, Drechsler U, Häberle W, Lutwyche MI, Vettiger P, Mamin HJ, Chui BW, Kenny TW (1999) Appl Phys Lett 74:1329CrossRefGoogle Scholar
  15. 15.
    Xu S, Liu GY (1997) Langmuir 12:127CrossRefGoogle Scholar
  16. 16.
    Xu S, Miller S, Laibinis PE, Liu GY (1999) Langmuir 15:7244CrossRefGoogle Scholar
  17. 17.
    Mamin HJ, Guethner PH, Rugar D (1990) Phys Rev Lett 65:2118CrossRefGoogle Scholar
  18. 18.
    Pascual JI, Méndez J, Gómez-Herrero J, Baró AM, García N, Binh VT (1993) Phys Rev Lett 71:1852CrossRefGoogle Scholar
  19. 19.
    Hosaka S, Koyanagi H (1994) Jpn J Appl Phys part 2 33:L1358CrossRefGoogle Scholar
  20. 20.
    Ramsperger U, Uchihashi T, Nejoh H (2001) Appl Phys Lett 78:85CrossRefGoogle Scholar
  21. 21.
    Calleja M, Tello M, Anguita J, Garcia F, Garcia R (2001) Appl Phys Lett 79:2471CrossRefGoogle Scholar
  22. 22.
    Israelachvili JN (1992) Intermolecular and Surface Forces. Academic Press, LondonGoogle Scholar
  23. 23.
    Piner RD, Zhu J, Xu F, Hong S, Mirkin CA (1999) Science 283:661CrossRefGoogle Scholar
  24. 24.
    Noy A, Miller AE, Klare JE, Weeks BL, Woods BW, DeYoreo JJ (2002) Nano Lett 2:109CrossRefGoogle Scholar
  25. 25.
    Sheehan PE, Whitman LJ (2004) Appl Phys Lett 85:1589CrossRefGoogle Scholar
  26. 26.
    Ginger DS, Zhang H, Mirkin CA (2004) Angew Chem Int Ed 43:30CrossRefGoogle Scholar
  27. 27.
    Dagata JA, Schneir J, Harary HH, Bennet J, Tseng W (1991) J Vac Sci Technol B 9:11384CrossRefGoogle Scholar
  28. 28.
    Dagata JA, Tseng W, Bennet J, Schneir J, Harary HH (1991) J Appl Phys 70:3661CrossRefGoogle Scholar
  29. 29.
    Thundat T, Nagahara LA, Oden PI, Lindsay SM, George MA, Glaunsinger WS (1990) J Vac Sci Technol A 8:3527Google Scholar
  30. 30.
    Day HC, Allee DR (1993) Appl Phys Lett 62:2691CrossRefGoogle Scholar
  31. 31.
    García R, Calleja M, Pérez-Murano F (1998) Appl Phys Lett 72:2295CrossRefGoogle Scholar
  32. 32.
    Pérez-Murano F, Abadal G, Varonil N, Aymerich X, Servat J, Gorostiza P, Sanz F (1995) J Appl Phys 78:6797CrossRefGoogle Scholar
  33. 33.
    Snow ES, Campbell PM (1995) Science 270:1639Google Scholar
  34. 34.
    Tello M, García R (2001) Appl Phys Lett 79:424CrossRefGoogle Scholar
  35. 35.
    Garcia R, San Paulo A (1999) Phys Rev B 60:4961CrossRefGoogle Scholar
  36. 36.
    Garcia R, Calleja M, Rohrer H (1999) J Appl Phys 86;1898CrossRefGoogle Scholar
  37. 37.
    Gómez-Moñivas S, Sáenz JJ, Calleja M, García R (2003) Phys Rev Lett 91:056101CrossRefGoogle Scholar
  38. 38.
    García-Martín A, García R (submitted)Google Scholar
  39. 39.
    Calleja M, Tello M, García R (2002) J Appl Phys 92:5539CrossRefGoogle Scholar
  40. 40.
    Okada Y, Iuchi Y, Kawabe M, Harris Jr JS (2000) J Appl Phys 88:1136CrossRefGoogle Scholar
  41. 41.
    Lazzarino M, Jun S, Ressel B, Prince KC, Ascoli C (2002) Appl Phys Lett 81:2842CrossRefGoogle Scholar
  42. 42.
    Morimoto K, Pérez-Murano F, Dagata J (2000) Appl Surf Sci 158:205CrossRefGoogle Scholar
  43. 43.
    Sasa S, Ikeda T, Akahori M, Kajiuchi A, Inoue M (1998) Jpn J Appl Phys 38:1064CrossRefGoogle Scholar
  44. 44.
    M. Tello (2004) Doctoral Thesis. Universidad Autónoma de Madrid, SpainGoogle Scholar
  45. 45.
    Shirakashi J, Ishii, M, Matsumoto K, Miura N, Konagai M (1996) Jpn J Appl Phys 35:L1524CrossRefGoogle Scholar
  46. 46.
    Sugimura H, Uchida T, Kitamura N, Masuhara H (1993) Appl Phys Lett 63:1288CrossRefGoogle Scholar
  47. 47.
    Rolandi M, Suez I, Dai H, Fréchet JM (2004) Nano Lett 4:889CrossRefGoogle Scholar
  48. 48.
    Abadal G, Boisen A, Davis ZJ, Hansen O, Grey F (1999) Appl Phys Lett 74:3206CrossRefGoogle Scholar
  49. 49.
    Wang D, Tsau L, Wang KL, Chow P (1995) Appl Phys Lett 67:1295CrossRefGoogle Scholar
  50. 50.
    Gwo S, Yeh CL, Chen PF, Chou YC, Chen TT, Chao TS, Hu SF, Huang TY (1999) Appl Phys Lett 74:1090CrossRefGoogle Scholar
  51. 51.
    Xie XN, Chung HJ, Sow CH, Wee TS (2004) Appl Phys Lett 84:4914CrossRefGoogle Scholar
  52. 52.
    Chien FSS, Chou YC, Chen TT, Hsieh WF, Chao TS, Gwo S (2001) J Apl Phys 89:2465CrossRefGoogle Scholar
  53. 53.
    Pellegrino L, Pallechi I, Marré D, Belingeri E, Siri AS (2002) Appl Phys Lett 81:3849CrossRefGoogle Scholar
  54. 54.
    Song I, Kim BM, Park G (2000) Appl Phys 76:601Google Scholar
  55. 55.
    Maoz R, Cohen SR, Sagiv J (1999) Adv Mater 11:55CrossRefGoogle Scholar
  56. 56.
    Hoeppener S, Maoz R, Cohen SR, Chi L, Fuchs H, Sagiv J (2002) Adv Mater 14:1036CrossRefGoogle Scholar
  57. 57.
    Wouters D, Schubert US (2003) Langmuir 19:9033CrossRefGoogle Scholar
  58. 58.
    Marchi F, Bouchiat V, Dallaporta H, Safarov V, Tonneau D, Doppelt P (1998) J Vac Sci Technol B 16:2952CrossRefGoogle Scholar
  59. 59.
    Wei YY, Eres G (2000) Appl Phys Lett 76:194CrossRefGoogle Scholar
  60. 60.
    Tello M, García R (2003) Appl Phys Lett 83:2339CrossRefGoogle Scholar
  61. 61.
    Tello M, García R, Martín-Gago JA, Martín-González MS, Martínez NF, Aballe L, Barinov A, Gregoratti L (2005) Adv Mater 17:1480CrossRefGoogle Scholar
  62. 62.
    Sugimura H, Nakagiri N (1995) Jpn J Appl Phys 34:3406CrossRefGoogle Scholar
  63. 63.
    Teuschler T, Mahr K, Miyazaki S, Hundhausen M, Levy L (1995) Appl Phys Lett 67:3144CrossRefGoogle Scholar
  64. 64.
    Avouris P, Hertel T, Martel R (1997) Appl Phys Lett 71:287CrossRefGoogle Scholar
  65. 65.
    Stiévenard D, Fontaine PA, Dubois E (1997) Appl Phys Lett 70:3272CrossRefGoogle Scholar
  66. 66.
    Pérez-Murano F, Birkelund K, Morimoto K, Dagata JA (1999) Appl Phys Lett 75:199CrossRefGoogle Scholar
  67. 67.
    Calleja M, Anguita J, García R, Birkelund K, Pérez-Murano F, Dagata J (1999) Nanotechnology 1:10Google Scholar
  68. 68.
    Dagata JA, Pérez-Murano F, Abadal G, Morimoto K, Inoue T, Itoh J, Yokoyama H (2000) Appl Phys Lett 76:2710CrossRefGoogle Scholar
  69. 69.
    Dubois E, Bubendorff JL (2000) J Appl Phys 87:8148CrossRefGoogle Scholar
  70. 70.
    Calleja M, García R (2000) Appl Phys Lett 76:3427CrossRefGoogle Scholar
  71. 71.
    Dagata JA, Pérez-Murano F, Martín C, Kuramochi H, Yokoyama H (2004) J Appl Phys 96:2386CrossRefGoogle Scholar
  72. 72.
    Cabrera N, Mott NF (1948) Rep Prog Phys 12:163CrossRefGoogle Scholar
  73. 73.
    Uhlig HH (1956) Acta Metall 4:541CrossRefGoogle Scholar
  74. 74.
    Cooper EB, Manalis SR, Fang H, Dai H, Matsumoto K, Minne SC, Hunt T, Quate CF (1999) Appl Phys Lett 75:3566CrossRefGoogle Scholar
  75. 75.
    Gotoh Y, Matsumoto K, Maeda T, Cooper EB, Manalis SR, Fang H, Minne SC, Hunt T, Dai H, Harris J, Quate CF (2000) J Vac Sci Technol A 18:1321CrossRefGoogle Scholar
  76. 76.
    Tello M, García F, García R (2002) J Appl Phys 92:4075CrossRefGoogle Scholar
  77. 77.
    Minne SC, Adams JD, Yaralioglu G, Manalis SR, Atalar A, Quate CF (1998) Appl Phys Lett 73:1742CrossRefGoogle Scholar
  78. 78.
    Chien FSS, Wu CL, Chou YC, Chen TT, Gwo S, Hsieh WF (1999) Appl Phys Lett 73:2429CrossRefGoogle Scholar
  79. 79.
    Maoz R, Frydman E, Cohen SR, Sagiv J (2000) Adv Mater 12:725CrossRefGoogle Scholar
  80. 80.
    Liu S, Maoz R, Schmid G, Sagiv J (2002) Nanoletters 2:1055Google Scholar
  81. 81.
    Hoeppener S, Maoz R, Sagiv J (2003) Nanoletters 3:761Google Scholar
  82. 82.
    Yasuda T, Yamasaki S, Gwo S (2000) Appl Phys Lett 77:3917CrossRefGoogle Scholar
  83. 83.
    Martín-Sánchez J, Gónzalez Y, González L, Tello M, García R, Granados D, García JM, Briones F (2005) J Crystal Growth 284:313CrossRefGoogle Scholar
  84. 84.
    Yoshinobu T, Suzuki J, Kurooka H, Moon WC, Iwasaki H(2003) Electrochim Acta 48:3131CrossRefGoogle Scholar
  85. 85.
    García R, Tello M, Moulin JF, Biscarini F (2004) Nanolett 4:1115Google Scholar
  86. 86.
    Gwo S, Yasuda T, Yamasaki S (2001) J Vac Sci Technol A 19:1806CrossRefGoogle Scholar
  87. 87.
    Sugimura H, Nakagiri N (1995) Appl Phys Lett 66:1430CrossRefGoogle Scholar
  88. 88.
    Sugimura H, Nakagiri N, Ichinose N (1995) Appl Phys Lett 66:3686CrossRefGoogle Scholar
  89. 89.
    Komeda T, Namba K, Nishioka Y (1997) Appl Phys Lett 70:3398CrossRefGoogle Scholar
  90. 90.
    Biscarini F, Zamboni R, Samori P, Ostoja P, Taliani C (1995) Phys Rev B 52:14868CrossRefGoogle Scholar
  91. 91.
    Minne SC, Soh HT, Flueckiger Ph, Quate CF (1995) Appl Phys Lett 66:703CrossRefGoogle Scholar
  92. 92.
    Campbell PM, Snow ES, McMarr PJ (1995) Appl Phys Lett 66:1388CrossRefGoogle Scholar
  93. 93.
    Matsumoto K, Gotoh Y, Maeda T, Dagata JA, Harris JS (2000) J Vac Sci Technol A 18:1321CrossRefGoogle Scholar
  94. 94.
    Bouchiat V, Faucher M, Thirion C, Wernsdorfer W, Fournier T, Pannetier B (2001) Appl Phys Lett 79:123CrossRefGoogle Scholar
  95. 95.
    Fuhrer A, Lüscher S, Ihn T, Heinzel T, Ensslin K, Wegscheider W, Bichler M (2001) Nature 413:822CrossRefGoogle Scholar
  96. 96.
    Campbell PM, Snow ES, McMarr PJ (1994) Solid State Electron 37:583CrossRefGoogle Scholar
  97. 97.
    Clément N, Tonneau D, Dallaporta H, Bouchiat V, Fraboulet D, Mariole D, Gautier J, Safarov V (2002) Physica E 13:999CrossRefGoogle Scholar
  98. 98.
    Abadal G, Boisen A, Davis ZJ, Hansen O, Grey F (1999) Appl Phys Lett 74:3206CrossRefGoogle Scholar
  99. 99.
    Snow ES, Park D, Campbell PM (1996) Appl Phys Lett 69:269CrossRefGoogle Scholar
  100. 100.
    Snow ES, Campbell PM, Buot FA, Park D, Marrian CRK, Magno R (1998) Appl Phys Lett 72:3071CrossRefGoogle Scholar
  101. 101.
    Devoret MH, Esteve D, Urbina C (1992) Nature 360:547CrossRefGoogle Scholar
  102. 102.
    Shirakasi J, Matsumoto K, Miura N, Konagai M (1997) Jpn J Appl Phys 36:L1257CrossRefGoogle Scholar
  103. 103.
    Matsumoto K, Gotoh Y, Maeda T, Dagata J, Harris J (1999) Jpn J Appl Phys 38:477CrossRefGoogle Scholar
  104. 104.
    Shirakashi J, Matsumoto K, Miura N, Konagai M (1998) Appl Phys Lett 72:1893CrossRefGoogle Scholar
  105. 105.
    Held R, Lüscher S, Heinzel T, Ensslin K, Wegscheider W (1999) Appl Phys Lett 75:1134CrossRefGoogle Scholar
  106. 106.
    Curson NJ, Nemutudi R, Appleyard NJ, Pepper M, Ritchie DA, Jones GAC (2001) Appl Phys Lett 78:3466CrossRefGoogle Scholar
  107. 107.
    Lutwyche M, Andreoli C, Binnig G, Brüger J, Drechsler U, Haeberle W, Rohrer H, Rothuzen H, Vettiger P, Yaralioglu G, Quate CF (1999) Sens Actuators A 73:89CrossRefGoogle Scholar
  108. 108.
    Cavallini M, Mei P, Biscarini F, García R (2003) Appl Phys Lett 83:5286CrossRefGoogle Scholar
  109. 109.
    Farkas N, Comer JR, Zhang G, Evans EA, Ramsier RD, Wight S, Dagata JA (2004) Appl Phys Lett 85:5691CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2006

Authors and Affiliations

  • Marta Tello
    • 1
  • Fernando García
    • 1
  • Ricardo García
    • 1
  1. 1.Instituto de Microelectrónica de MadridCSICTres Cantos, MadridSpain

Personalised recommendations