Advertisement

Excimer Lasers for Microlithography

  • R. Pätzel
  • U. Stamm

Keywords

Excimer Laser Numerical Aperture Voice Coil Motor Optical Lithography Projection Lens 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    P. Rai-Choudhury (Ed.): Handbook of Microlithography, Micromachining and Microfabrication (co-published by SPIE and The Institution of Electrical Engineers, 1997)Google Scholar
  2. 2.
    G.E. Moore: Electronics 38(8) (1965)Google Scholar
  3. 3.
    http://public.itrs.net/Google Scholar
  4. 4.
    D. Tennenhouse: “Nano-scale technologie: Getting from science to engineering”, in Proceedings of Nanotech, Intel, Boston, MA, USA (08 March 2004)Google Scholar
  5. 5. B.J. Lin: Journal of Microlithography, Microfabrication and Microsystems 3, 377 (2004)Google Scholar
  6. 6.
    W. Zschocke, H.S. Albrecht, T. Schroeder, I. Bragin, P. Lokai, F. Seddighi, C. Reusch, A. Cortona, K. Schmidt, R. Paetzel, K. Vogler: Proceedings of SPIE 4691, 1722–1733 (2002)Google Scholar
  7. 7.
    C. Oh, V.B. Fleurov, T. Hofmann, T.P. Duffey, F. Trintchouk, P. O’Keeffe, P.C. Newman, G.M. Blumenstock: Proceedings of SPIE 4691, 1753–1760 (2002)Google Scholar
  8. 8.
    K. Vogler, I. Klaft, F. Voss, I. Bragin, E. Bergmann, T. Nagy, N. Niemoeller, S. Spratte, R. Paetzel: Proceedings of SPIE 4691, 660–670 (2002)Google Scholar
  9. 9.
    S.V. Govorkov, A.O. Wiessner, G. Hua, T.V. Misuryaev, A.N. Knysh, S. Spratte, P. Lokai, T. Nagy, I. Bragin, A. Targsdorf, T. Schroeder, H. Albrecht, R. Desor, T. Schmidt, R. Paetzel: Proceedings of SPIE 5377, 1787–1796 (2004)Google Scholar
  10. 10.
    K. Kakizaki, J. Fujimoto, T. Yamazaki, T. Suzuki, T. Matsunaga, Y. Kawasuji, Y. Watanabe, M. Kaminishi, T. Inoue, H. Mizoguchi, T. Kumazaki, T. Ariga, T. Watanabe, T. Yabu, K. Sasano, T. Hori, O. Wakabayashi, A. Sumitani: Proceedings of SPIE 5377, 1805–1814 (2004)Google Scholar
  11. 11.
    T. Ishihara, H. Besaucele, C.A. Maley, V.B. Fleurov, P. O’Keeffe, M.E. Haviland, R.G. Morton, W.D. Gillespie, T.S. Dyer, B. Moosman, R. Poole: Proceedings of SPIE 5377, 1858–1865 (2004)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2005

Authors and Affiliations

  • R. Pätzel
  • U. Stamm

There are no affiliations available

Personalised recommendations