High-Repetition-Rate Applications of Excimer Lasers

  • R. F. Delmdahl
  • L. Herbst
  • B. Nikolaus


Excimer Laser High Repetition Rate Spatial Light Modulation Laser Tube Excimer Laser Pulse 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    W. Zschocke, H.S. Albrecht, T. Schröder, I. Bragin, M. Sprenger, F. Seddighi, C. Reusch, A. Cortona, K. Schmidt, R. Pätzel, K. Vogler: “High repetition rate excimer lasers for 193 nm lithography”, in Proc SPIE Microlithography, Santa Clara, CA (March 2002)Google Scholar
  2. 2.
    B. Burghardt, H.J. Kahlert, D. Basting: “High resolution excimer laser based micromachining”, in Laser Treatment of Materials, Proc. of ECLAT, ed. by B.L. Mordike (1992), pp. 609–613Google Scholar
  3. 3.
    R. Delmdahl: Laser Focus World pp. 53–58 (July 2002)Google Scholar
  4. 4.
    D.H. Parker, R. Delmdahl, B.L.G. Bakker, H.P. Loock: J. Chin. Chem. Soc. 48(3), 327–332 (2001)Google Scholar
  5. 5.
    R. Pätzel, U. Stamm, I. Bragin, F. Voß, B. Nikolaus, H. Endert, D. Basting: Proc. SPIE 2992(01), 2 (1997)Google Scholar
  6. 6.
    G. Spiecker, R. Delmdahl: Laser Magazin 6, 10–13 (2002)Google Scholar
  7. 7.
    H. Endert, M. Kauf, R. Pätzel: Laser Opto 31(4), 46–53 (1999)Google Scholar
  8. 8.
    T. Kuntze, M. Panzner, U. Klotzbach, E. Beyer: “New excimer laser marking method using micro mirror devices”, in Proc. 4thInternational Symposium on Laser Precision Microfabrication, Munich (2003)Google Scholar
  9. 9.
    D. Ristau: Business Briefing: Global Photonics Applications and Technology pp. 1–6 (2002)Google Scholar
  10. 10.
    H. Lubatschowski, A. Heisterkamp, F. Will, A.I. Singh, J. Serbin, A. Ostendorf, O. Kermani, R. Hermann, H. Welling, W. Ertmer: RIKEN Review No. 50: Focused on Laser Precision Microfabrication (LPM 2002) 50, 113–118 (2003)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2005

Authors and Affiliations

  • R. F. Delmdahl
  • L. Herbst
  • B. Nikolaus

There are no affiliations available

Personalised recommendations