TFT Annealing

  • M. Fiebig


Excimer Laser Amorphous Silicon Line Beam Annealing System Excimer Laser Annealing 
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  1. 1.
    H. Kuriyama, et al.: Jpn. J. Appl. Physics 32(12B), 6190–5 (1993)Google Scholar
  2. 2.
    H. Kuriyama, et al.: Jpn. J. Appl. Physics 30(12B), 3700–3 (1991)Google Scholar
  3. 3.
    J.S. Im, H.J. Kim, M.O. Thompson: Appl. Phys. Lett. 63, 1969 (1993)Google Scholar
  4. 4.
    H. Kuriyama: Paper given at ESSDERC _96, Bologna, 8–11 September 1996Google Scholar
  5. 5.
    S.D. Brotherton, et al.: in Proceedings of the AMLCD 96 Conference Kobe, Japan (1996)Google Scholar
  6. 6.
    R. Sposili, J. Im: Appl. Phys. A 67, 273–276 (1998)Google Scholar
  7. 7.
    M. Crowder, et al.: IEEE Electron Device Letters 19(8) (1998)Google Scholar
  8. 8.
    M. Crowder, et al.: in Mat. Res. Soc. Symp. Proc. Vol. 621 (2000), pp. Q9.6.1–6Google Scholar
  9. 9.
    H.J. Kahlert, et al.: in SPIE Vol. 5004 (2003), pp. 20–27Google Scholar
  10. 10.
    H.J. Kahlert: Rev. of Laser Engin. 31(1), 40–45 (2003)Google Scholar
  11. 11.
    in SPIE Vol. 5004 (2003)Google Scholar
  12. 12.
    Y. Helen, et al.: Thin Solid Films 383, 143–146 (2001)Google Scholar
  13. 13.
    Samsung 21.3-inch TFT-LCD (May 2003)Google Scholar

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© Springer-Verlag Berlin Heidelberg 2005

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  • M. Fiebig

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