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Nano-Structuring with Femtosecond Excimer Laser Pulses

  • J.-H. Klein-Wiele
  • J. Bekesi
  • J. Ihlemann
  • P. Simon

Keywords

Photonic Crystal Order Beam Interference Technique Partial Beam Sapphire Laser System 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2005

Authors and Affiliations

  • J.-H. Klein-Wiele
  • J. Bekesi
  • J. Ihlemann
  • P. Simon

There are no affiliations available

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