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Micro-Processing of Borosilicate Glass and Polymers

  • B. Keiper
  • T. Petsch
  • H. Exner

Keywords

Repetition Rate Excimer Laser Pulse Repetition Rate Ablation Rate Pyrex Glass 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    B. Keiper, H. Exner, U. Löschner, T. Kunze: J. Laser Applications 12(5), 189–193 (2000)Google Scholar
  2. 2.
    B. Keiper, R. Ebert, R. Böhme, H. Exner: Proceedings of SPIE 5116, 20–27 (2003)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2005

Authors and Affiliations

  • B. Keiper
  • T. Petsch
  • H. Exner

There are no affiliations available

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