• M. Wehner


Laser Ablation Pulse Laser Deposition Excimer Laser Ablation Depth Laser Cleaning 
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  1. 1.
    R. Burnham, N. Harris, N. Dieu: Appl. Phys. Lett. 28, 86 (1976)Google Scholar
  2. 2.
    C. Wang, H. Mirels, D. Sutton, S. Suchard: Appl. Phys. Lett. 28, 326 (1976)Google Scholar
  3. 3.
    R. Srinivasan: Science 234, 559–565 (1986)PubMedGoogle Scholar
  4. 4.
    D. Ehrlich, R. Osgood, T. Deutsch: J. Vac. Sci. Technol. 21(1), 23 (1982)Google Scholar
  5. 5.
    A. Gupta, G. West, K. Beeson: J. Appl. Phys. 58(9), 3573 (1985)Google Scholar
  6. 6.
    V. Donnelly, D. Brasen, A. Appelbaum, M. Geva: J. Appl. Phys. 58(5), 2020 (1985)Google Scholar
  7. 7.
    D. Lowndes, D. Geohegan, D. Eres, Pennycook, D. Mashburn, G.J. Jellison: Appl. Phys. Lett. 52, 1868 B 1870 (1988)Google Scholar
  8. 8.
    A. Yamada, A. Satoh, M. Konagai, K. Takahashi: J. Appl. Phys. 65, 4268–4272 (1989)Google Scholar
  9. 9.
    J. Goto, T. Yagi, H. Nagai: “Synthesis of diamond films by laser-induced chemical vapor deposition”, in Mat. Res. Soc. Symp. Proc. (1989), no. 129, pp. 213–217Google Scholar
  10. 10.
    M. Katsuhiko, Y. Yamady, T. Iwabuchi, T. Miyata: J. Appl. Phys. 68, 1361–1363 (1990)Google Scholar
  11. 11.
    D. Dijkkamp, T. Venkatesan, et al.: Appl. Phys. Lett. 51, 619 (1987)Google Scholar
  12. 12.
    D. Ghica, M. Gartner, F. Ciobanu, V. Nelea, C. Martin, I.N. Mihailescu: “High optical quality LiNbO3 thin films obtained by pulsed laser deposition”, in OPTIKA ‘98: 5th Congress on Modern Optics / SPIE; Int. Comm. Opt.; Hungarian Nat. Committe for Tech. Dev. Found. Ind.; et al. — 14–17 Sept. 1998. Proc. SPIE — Int. Soc. Opt. Eng. (USA). — Budapest, Hungary Vol. 3573 (1998), pp. 130–3Google Scholar
  13. 13.
    Y. Yamagata, A. Sharma, J. Narayan, R. Mayo, J. Newman, K. Ebihara: J. Appl. Phys. 86, 4154 (1999)Google Scholar
  14. 14.
    R. Dietsch, T. Holz, H. Mai, C.F. Meyer, R. Scholz, B. Wehner: “High precision large area pld of x-ray optical multilayers”, in 4th International Conference on Laser Ablation / COLA ‘97, 20.–25.7.97, Monterey, CA (Applied Surface Science, 1998), no. 127–129, pp. 451–456Google Scholar
  15. 15.
    D.B. Chrisey, G.K. Huber (Eds.): Pulsed Laser Deposition of Thin Films (Wiley-Interscience, New York, 1994)Google Scholar
  16. 16.
    I. Takeuchi, H. Chang, C. Gao, P. Schultz, X.D. Xiang, R.P. Sharma, M.J. Downes, T. Venkatesan: Appl. Phys. Lett. 73, 894 (1998)Google Scholar
  17. 17.
    Epion corporation, Boston, USA, Scholar
  18. 18.
    Surface, Hueckelhoven, Germany, Scholar
  19. 19.
    Neocera, Beltsville, USA, /html-files/pld/systems.htmGoogle Scholar
  20. 20.
    E. Lerner: Laser Focus World 12(35) (1999)Google Scholar
  21. 21.
    P. Burggraaf: Solid State Technology p. 31 (2000)Google Scholar
  22. 22.
    W. Sesselmann, E.E. Marinero, T.J. Chuang: Appl. Phys. A 41, 209–221 (1986)Google Scholar
  23. 23.
    S. Küper, K. Brannon, J. Brannon: Laser Ablation of Electronic Materials (Elsevier Science Publisher B.V., 1992), 213–220Google Scholar
  24. 24.
    W. Sesselmann, E. Hudeczek, F. Bachmann: J. Vac. Sci. Technol. B 7, 1284–1294 (1989)Google Scholar
  25. 25.
    W. Pfleging, D.A. Wesner, E.W. Kreutz: “CCl4-assisted CF4 etching of silicon in a microwave-assisted LDE (laser dry etching)-process”, in Laser Ablation. Symposium F: Third International Symposium on Laser Ablation (COLA’95) 1995 E-MRS Spring Conference / Council of Eur.; Comm. Eur. Communities. — 22-26 May 1995. In: Appl. Surf. Sci. (Netherlands). Vol. 96–98, April 1996 (Strasbourg, France, Netherlands: Elsevier, 1996), pp. 496–500Google Scholar
  26. 26.
    Lambda Highlights No. 47, May 1995, Publication by Lambda PhysikGoogle Scholar
  27. 27.
    A.C. Tam, et al.: J. Appl. Phys. 71(7) (1992)Google Scholar
  28. 28.
    E. Hontzopoulos, C. Fotakis, M. Doulgeridis: in Proc. SPIE Vol. 1810 (1992), p. 749Google Scholar
  29. 29.
    C. Troll, H. Römich, K. Dickmann, J. Hildenhagen: “Cleaning of corrosion crusts on stained glass windows with excimer lasers”, in Proc. of 12th Triennial Meeting of the ICOM COMITTEE FOR CONSERVATION, Lyon, France, 29. August — 3. September 1999, Vol. 2 (1999), pp. 816–820Google Scholar
  30. 30.
    K. Dickmann, F. Fekrsanati, S. Klein, H. Römrich, C. Troll, U. Drewello: Laser Magazin 2, 9–13 (1999)Google Scholar
  31. 31.
    S. Klein, T. Stratoudaki, V. Zafiropoulos, J. Hildenhagen, K. Dickmann, T. Lehmkuhl: Appl. Phys. A 69, 441–444 (1999)Google Scholar
  32. 32.
    European research project (CRAFT) “Advanced workstation for controlled laser cleaning of artwork” (ENV4-CT98-0787)Google Scholar
  33. 33. Scholar
  34. 34.
    H. Endert, M. Kauf, R. Pätzel: Laser Opto 31(4), 46–53 (1999)Google Scholar
  35. 35.
    K. Kincade, S.G. Anderson: Laser Focus World 35 (2000)-39 (2003). see also Pennwell’s archive: Scholar

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  • M. Wehner

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