Optical Coatings for Excimer Laser Applications
KeywordsMultilayer Coating Optical Coating High Refractive Material High Energy Synchrotron Radiation Generation Lithography
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- 1.N. Kaiser, H.K. Pulker (Eds.): Optical Interference Coatings, Vol. 88 of Springer Series in Optical Sciences (Springer, 2003)Google Scholar
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