Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
ISO/DIS 11146-I: (2003), “Test methods for laser beam widths, divergence angles and beam propagation ratios — part 1: Stigmatic and simple astigmatic beams”
ISO/DIS 11670: (2002), “Test methods for laser beam parameters: Beam positional stability”
ISO/DIS 13694: (1999), “Test methods for laser beam parameters: Power (energy) density distribution”
ISO/DIS 15367-I: (2003), “Test methods for determination of the shape of a laser beam wavefront — part 1: Terminology and fundamental aspects”
ISO/DIS 15367-II: (2003), “Test methods for determination of the shape of a laser beam wavefront — part 2: Hartmann-shack sensors”
D. Nickel (Ed.): Instruments and Standard Test Procedures for Laser Beam and Optics Characterization (VDI-Technology Center, Düsseldorf, Germany, 2003), brochure to the final presentation of EUREKA project CHOCLAB II (EU-2359)
B. Schäfer, K. Mann, D. Neal, B. Eppich, B. Neubert, W. Scharfe, T. Stark, C. Roundy: “Round-robin test on laser beam characterisation / ISO 15367 and ISO 11146”, to be published
K. Mann, J. Ohlenbusch, V. Westphal: “Characterization of excimer laser beam parameters”, in Proc. of 3rd Int. Workshop on Laser Beam and Optics Characterization (LBOC), Quebec/Kanada, Juli 1996, SPIE Vol. 2870 (1996), p. 367
M.R. Latta, K. Jain: Optics Comm. 49, 435 (1984)
K. Jain: “Excimer laser lithography” (SPIE Optical Eng. Press, Bellingham, USA, 1990)
Y. Ozaki, K. Takamoto: Appl. Optics 28(1), 106 (1989)
K. Mann, A. Hopfmüller: “Characterization and shaping of excimer laser radiation”, in Proc. of 2nd Workshop on Laser Beam Characterization Berlin (1994), p. 347
W. Singer, H.P. Herzig, M. Kuittinen, E. Piper, J. Wangler: Opt. Eng. 35(10), 2779 (1996)
D.R. Neal, W.J. Alford, J. Gruetzner, M. Warren: “Amplitude and phase beam characterization using a two-dimensional wavefront sensor”, in SPIE Vol. 2870 (1996), p. 72
B. Schäfer, K. Mann: “Investigation of the propagation characteristics of excimer lasers using a hartmann-shack sensor”, Rev. Sci. Instrum. 71, 2663 (2000)
D. Schäfer, J. Ihlemann, K. Mann, G. Marowsky: Appl. Phys. A 69(319), 1999
B. Schäfer, K. Mann: Appl. Optics 41(15), 2809–2817 (2002)
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2005 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Mann, K. (2005). Laser Beam Characterization. In: Basting, D., Marowsky, G. (eds) Excimer Laser Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-26667-4_10
Download citation
DOI: https://doi.org/10.1007/3-540-26667-4_10
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-20056-7
Online ISBN: 978-3-540-26667-9
eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)