High-k Crystalline Gate Dielectrics: An IC Manufacturer's Perspective

  • R. Droopad
  • K. Eisenbeiser
  • A.A. Demkov
Part of the Springer Series in Advanced Microelectronics book series (MICROELECTR., volume 16)


Gate Dielectric Short Channel Gate Leakage Current Equivalent Oxide Thickness Charge Neutrality Level 
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© Springer-Verlag Berlin Heidelberg 2005

Authors and Affiliations

  • R. Droopad
  • K. Eisenbeiser
  • A.A. Demkov

There are no affiliations available

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