This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
2.5 Further Reading
J. Murota, B. Tillack, M. Caymax, J. Sturm, Y. Yasuda, S. Zaima, Proc. First Internat. SiGe Technology and Device Meeting, Appl. Surf. Sci., Vol. 224 (2004)
R. Waser, Nanoelectronics and Information Technology, Wiley-VCH, Weinheim (2003)
C.K. Maiti, N.B. Chakrabarti, S.K. Ray, Strained Silicon Heterostructures Materials and Devices, The Institution of Electrical Engineers, London (2001)
E. Kapser and K. Lyutovich, Properties of Silicon Germanium and SiGe:Carbon, EMIS Datareviews, Vol.24, INSPEC, London (2000)
M.A. Herman and H. Sitter, Molecular Beam Epitaxy: Fundamentals and Current Status, 2nd Edition, Springer-Verlag, Berlin (1996)
J.F.A. Nijs, Advanced Silicon and Semiconducting Silicon-Alloy Based Materials and Devices, IOP publishing, Bristol (1994)
F. Schaeffler, Semicond. Sci. Technol. 12, 1515 (1997)
E. Kasper, K. Lyutovich, Solid-State Electronics 48, 1257 (2004)
Rights and permissions
Copyright information
© 2005 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
(2005). Material Science. In: Silicon Quantum Integrated Circuits. NanoScience and Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-26382-9_2
Download citation
DOI: https://doi.org/10.1007/3-540-26382-9_2
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-22050-3
Online ISBN: 978-3-540-26382-1
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)