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Material Science

Part of the NanoScience and Technology book series (NANO)

Keywords

Chemical Vapour Deposition Burger Vector Lattice Mismatch Critical Thickness Electron Beam Lithography 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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2.5 Further Reading

  1. 1.
    J. Murota, B. Tillack, M. Caymax, J. Sturm, Y. Yasuda, S. Zaima, Proc. First Internat. SiGe Technology and Device Meeting, Appl. Surf. Sci., Vol. 224 (2004)Google Scholar
  2. 2.
    R. Waser, Nanoelectronics and Information Technology, Wiley-VCH, Weinheim (2003)Google Scholar
  3. 3.
    C.K. Maiti, N.B. Chakrabarti, S.K. Ray, Strained Silicon Heterostructures Materials and Devices, The Institution of Electrical Engineers, London (2001)Google Scholar
  4. 4.
    E. Kapser and K. Lyutovich, Properties of Silicon Germanium and SiGe:Carbon, EMIS Datareviews, Vol.24, INSPEC, London (2000)Google Scholar
  5. 5.
    M.A. Herman and H. Sitter, Molecular Beam Epitaxy: Fundamentals and Current Status, 2nd Edition, Springer-Verlag, Berlin (1996)Google Scholar
  6. 6.
    J.F.A. Nijs, Advanced Silicon and Semiconducting Silicon-Alloy Based Materials and Devices, IOP publishing, Bristol (1994)Google Scholar
  7. 7.
    F. Schaeffler, Semicond. Sci. Technol. 12, 1515 (1997)Google Scholar
  8. 8.
    E. Kasper, K. Lyutovich, Solid-State Electronics 48, 1257 (2004)Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2005

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