Material Science

Part of the NanoScience and Technology book series (NANO)


Chemical Vapour Deposition Burger Vector Lattice Mismatch Critical Thickness Electron Beam Lithography 


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2.5 Further Reading

  1. 1.
    J. Murota, B. Tillack, M. Caymax, J. Sturm, Y. Yasuda, S. Zaima, Proc. First Internat. SiGe Technology and Device Meeting, Appl. Surf. Sci., Vol. 224 (2004)Google Scholar
  2. 2.
    R. Waser, Nanoelectronics and Information Technology, Wiley-VCH, Weinheim (2003)Google Scholar
  3. 3.
    C.K. Maiti, N.B. Chakrabarti, S.K. Ray, Strained Silicon Heterostructures Materials and Devices, The Institution of Electrical Engineers, London (2001)Google Scholar
  4. 4.
    E. Kapser and K. Lyutovich, Properties of Silicon Germanium and SiGe:Carbon, EMIS Datareviews, Vol.24, INSPEC, London (2000)Google Scholar
  5. 5.
    M.A. Herman and H. Sitter, Molecular Beam Epitaxy: Fundamentals and Current Status, 2nd Edition, Springer-Verlag, Berlin (1996)Google Scholar
  6. 6.
    J.F.A. Nijs, Advanced Silicon and Semiconducting Silicon-Alloy Based Materials and Devices, IOP publishing, Bristol (1994)Google Scholar
  7. 7.
    F. Schaeffler, Semicond. Sci. Technol. 12, 1515 (1997)Google Scholar
  8. 8.
    E. Kasper, K. Lyutovich, Solid-State Electronics 48, 1257 (2004)Google Scholar

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© Springer-Verlag Berlin Heidelberg 2005

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