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Sputtering by electrons and photons

  • Peter C. Townsend
Chapter
Part of the Topics in Applied Physics book series (TAP, volume 52)

Keywords

Defect Formation Colour Centre Electron Irradiation Halogen Atom Exciton State 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 1983

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  • Peter C. Townsend

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