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Sputtering of multicomponent materials

  • Gerhard Betz
  • Gottfried K. Wehner
Chapter
Part of the Topics in Applied Physics book series (TAP, volume 52)

Keywords

Auger Electron Spectroscopy Rutherford Backscatter Spectroscopy Surface Enrichment Multiphase Material Multicomponent Material 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer-Verlag 1983

Authors and Affiliations

  • Gerhard Betz
  • Gottfried K. Wehner

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