Introduction and overview

  • Rainer Behrisch
Part of the Topics in Applied Physics book series (TAP, volume 52)


The topics treated in this volume deal mostly with sputtering processes which are under active investigation and the theoretical description has mostly not yet advanced to a clear and closed picture. However, an attempt is made to summarise the status of the experimental results and the different theoretical interpretations offered.


Particle Bombardment Incident Particle Target Atom Collision Cascade Primary Knockon Atom 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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© Springer-Verlag 1983

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  • Rainer Behrisch

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