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Defect Complexes in Semiconductor Structures pp 50–58Cite as

Review of the possibilities of electron microscopy in the identification of defect structures

  • Part I. Defect Diagnostics
  • Conference paper
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Part of the book series: Lecture Notes in Physics ((LNP,volume 175))

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References

  1. J. Chikawa, S. Shirai, Jap. J. Appl. Phys. 18, Suppl. 18-1, 153 (1979)

    Google Scholar 

  2. P.B. Hirsch, R.W. Horne, M.J. Whelan, Phil. Mag. 1, 677 (1956)

    Google Scholar 

  3. W. Bollmann, Phys. Rev. 103, 1588 (1956)

    Google Scholar 

  4. P.B. Hirsch, A. Howie, R.B. Nicholson, M.J. Whelan, D.W. Pashley, Electron Microscopy of Thin Crystals, London, Butterworths (1965)

    Google Scholar 

  5. G. Thomas, M.J. Goringe, Transmission Electron Microscopy of Materials, New York, Wiley & Sons (1979)

    Google Scholar 

  6. A.K. Head, Aust. J. Phys. 20, 557 (1967)

    Google Scholar 

  7. P. Humble, Aust. J. Phys. 21, 325 (1968)

    Google Scholar 

  8. K. Scheerschmidt, J. Heydenreich, phys. status solidi(a) 42, 47 (1977)

    Google Scholar 

  9. D.J.H. Cockayne, I.L.F. Ray, M.J. Whelan, Phil. Mag. 20, 1265 (1969)

    Google Scholar 

  10. D.J.H. Cockayne, A. Hons, J. Phys. (Paris) 40, C6–11 (1979)

    Google Scholar 

  11. J.C.H. Spence, Experimental High-Resolution Electron Microscopy, Oxford, Clarendon Press (1981)

    Google Scholar 

  12. J.W. Menter, Proc. Roy. Soc. (London) A236, 119 (1956)

    Google Scholar 

  13. J.C.H. Spence, J.M. Cowley, R. Gronsky, Ultramicroscopy 4, 429 (1979)

    Google Scholar 

  14. K. Izui, S. Foruno, H. Otsu, J. Electron Micr. 26, 129 (1977)

    Google Scholar 

  15. J.L. Hutchison, C.J. Humphreys, A. Ourmazd, P.B. Hirsch, Proc. 7th Europ. Reg. Conf. Electr. Micr., The Hague 1980, Vol.I, P.304

    Google Scholar 

  16. T.Y. Tan, H. Föll, S.M. Hu, Phil. Mag. A44, 127 (1981)

    Google Scholar 

  17. I.G. Salisbury, M.H. Loretto, Phil. Mag. A39, 317 (1979)

    Google Scholar 

  18. J.A. Lambert, P.S. Dobson, Phil. Mag. A44, 1043 (1981)

    Google Scholar 

  19. M. Pasemann, Z. Lilienthal, J. Microsc. Spectrosc. Electron. 6, 123 (1981)

    Google Scholar 

  20. I.L. Krivanek, J.H. Mazur, Appl. Phys. Lett. 37, 392 (1980)

    Google Scholar 

  21. G.W. Cullen, M.S. Abrahams, J.F. Corboy, M.T. Duffy, W.E. Ham, L. Jastrzebski, R.T. Smith, M. Blumenfeld, G. Harbeke, J. Lagowski, J. Cryst. Growth 56, 281 (1982)

    Google Scholar 

  22. Proc. Int. Symp. In-Situ High Voltage Electron Microscopy, Halle 1979; in: Cryst. Res. Technol. 14, 1169 (1979)

    Google Scholar 

  23. H. Fujita, Y. Kawasaki, E. Furubayashi, S. Kajiwara, H. Taoka, Jap. J. Appl. Phys. 6, 214 (1967)

    Google Scholar 

  24. C.J. Varker, K.V. Ravi, J. Appl. Phys. 45, 272 (1974)

    Google Scholar 

  25. A. Ourmazd, D.B. Darby, G.R. Booker, Inst. Phys. Conf. Ser. No. 36, 251 (1977)

    Google Scholar 

  26. P.M. Petroff, D.V. Lang, J.L. Strudel, A. Savage, Proc. 9th Int. Congr. El-Micr., Toronto 1978, Vol.I, p.130

    Google Scholar 

  27. J. Heydenreich, H. Blumtritt, R. Gelichmann, H. Johansen, J. Phys. (Paris) 40, C6–23 (1979)

    Google Scholar 

  28. D. Fathy, T.G. Sparrow, U. Valdrè, J. Micr. (London) 118,263 (1980)

    Google Scholar 

  29. H. Leamy, J. Appl. Phys. 53, R51 (1982)

    Google Scholar 

  30. C. Donalato, Optic 52, 19 (1978)

    Google Scholar 

  31. L. Pasemann, Ultramicroscopy 6, 237 (1981)

    Google Scholar 

  32. G.R. Booker, A. Ourmazd, D.B. Darby, J. Phys. (Paris) 40, C6–19 (1979)

    Google Scholar 

  33. J. Heydenreich, H. Blumtritt, R. Gelichmann, H. Johansen, Scanning Electron Microscopy 1981/1 (Eds. P. Becker, O. Johari) Chicago, SEM Inc. 1981, p.315

    Google Scholar 

  34. H. Blumtritt, R. Gleichmann, J. Heydenreich, H. Johansen, physica status solidi (a) 55, 611 (1979)

    Google Scholar 

  35. H. Menniger, H. Raidt, R. Gleichmann, physica status solidi (a) 58, 173 (1980)

    Google Scholar 

  36. M. Kittler, W. Seifert, Cryst. Res. Technol. 16, 157 (1981)

    Google Scholar 

  37. J. Heydenreich, H. Blumtritt, R. Gleichmann, H. Johansen, Cryst. Res. Technol. 16, 133 (1981)

    Google Scholar 

  38. A. Ourmazd, E. Weber, H. Gottschalk, G.R. Booker, H. Alexander, Inst. Phys. Conf. Ser. No.60, Sect.I, 63 (1981)

    Google Scholar 

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Authors and Affiliations

  1. Institut für Festkörperphysik und Elektronenmikroskopie, Akademie der Wissenschaften der DDR, 4020, Halle, Wittenberg, DDR

    J. Heydenreich

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  1. J. Heydenreich
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Editor information

J. Giber F. Beleznay I. C. Szép J. László

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© 1983 Springer-Verlag

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Heydenreich, J. (1983). Review of the possibilities of electron microscopy in the identification of defect structures. In: Giber, J., Beleznay, F., Szép, I.C., László, J. (eds) Defect Complexes in Semiconductor Structures. Lecture Notes in Physics, vol 175. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-11986-8_3

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  • DOI: https://doi.org/10.1007/3-540-11986-8_3

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-11986-9

  • Online ISBN: 978-3-540-39456-3

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