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Radiation methods for creation of heterostructures on silicon

  • N. N. Gerasimenko
Part VI. Implantation, Annealing and Radiation Effects
Part of the Lecture Notes in Physics book series (LNP, volume 175)

Keywords

Electron Spin Resonance Radiation Method Irradiate Layer Microwave Annealing Silicon Carbide Film 
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Copyright information

© Springer-Verlag 1983

Authors and Affiliations

  • N. N. Gerasimenko
    • 1
  1. 1.NovosibirskUSSR

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