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Theoretical aspects of laser annealing

  • J. A. Van Vechten
Part VI. Implantation, Annealing and Radiation Effects
Part of the Lecture Notes in Physics book series (LNP, volume 175)

Keywords

Laser Annealing Solid State Comm Pulse Laser Annealing Heating Depth Scattering Matrix Element 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag 1983

Authors and Affiliations

  • J. A. Van Vechten
    • 1
  1. 1.IBM Thomas J. Watson Research CenterN.Y.USA

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