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Oxygen precipitation and the generation of secondary defects in oxygen-rich silicon

  • F. -G. Kirscht
  • P. Gaworzewski
  • K. Schmalz
  • I. Babanskaja
  • P. Zaumseil
  • U. Winter
Part III. Defects in Silicon
Part of the Lecture Notes in Physics book series (LNP, volume 175)

Keywords

Dislocation Loop Secondary Defect Volume Defect Oxygen Precipitation Prismatic Dislocation Loop 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

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Copyright information

© Springer-Verlag 1983

Authors and Affiliations

  • F. -G. Kirscht
    • 1
  • P. Gaworzewski
    • 1
  • K. Schmalz
    • 1
  • I. Babanskaja
    • 1
  • P. Zaumseil
    • 1
  • U. Winter
    • 1
  1. 1.Institut für Physik der Werkstoffbearbeitung BerlinAkademie der Wissenschaften der DDRBerlin-Rahnsdorf

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