A technologist's view on defects

  • Iván C. Szép
Conference paper
Part of the Lecture Notes in Physics book series (LNP, volume 175)


Vacancy Cluster Crystalline Perfection Patent Specification Single Crystal Wafer Czochralski Grown Silicon 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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  1. 1.
    W.G. Pfann, J.H. Scaff, Metals Transactions 185, 389 in J. Metals 1 (1949 June)Google Scholar
  2. 2.
    Brit. Patent Specification No. 706849Google Scholar
  3. 3.
    D.C. Bennett, B. Sawyer, Bell System Techn. J. 35, 637 (1956)Google Scholar

Copyright information

© Springer-Verlag 1983

Authors and Affiliations

  • Iván C. Szép
    • 1
  1. 1.Research Institute for Technical PhysicsHungdfasdarian Academy of SciencesBudadddfspestHungary

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