A technologist's view on defects
Part of the Lecture Notes in Physics book series (LNP, volume 175)
KeywordsVacancy Cluster Crystalline Perfection Patent Specification Single Crystal Wafer Czochralski Grown Silicon
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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© Springer-Verlag 1983