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X-ray lithography

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X-Ray Optics

Part of the book series: Topics in Applied Physics ((TAP,volume 22))

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  1. E. Spille
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  2. R. Feder
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Spille, E., Feder, R. (1977). X-ray lithography. In: Queisser, HJ. (eds) X-Ray Optics. Topics in Applied Physics, vol 22. Springer, Berlin, Heidelberg. https://doi.org/10.1007/3-540-08462-2_9

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