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Flow Control Methods and Devices in Micrometer Scale Channels

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Microfluidics

Part of the book series: Topics in Current Chemistry ((TOPCURRCHEM,volume 304))

Abstract

Recent advances in the fabrication of microflow devices using micro-electromechanical systems (MEMS) technology are described. Passive and active liquid flow control and particle-handling methods in micrometer-scale channels are reviewed. These methods are useful in micro total analysis systems (μTAS) and laboratory-on-a-chip systems. Multiple flow control systems (i.e., arrayed microvalves) for advanced high-throughput microflow systems are introduced. Examples of microflow devices and systems for chemical and biochemical applications are also described.

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Abbreviations

μTAS:

Micro total analysis systems

CFD:

Computational fluid dynamics

CMOS:

Complementary metal-oxide semiconductor

DEMUX:

Demultiplexer

DEP:

Dielectrophoresis

EOF:

Electro-osmotic flow

MEMS:

Micro-electromechanical systems

ODEP:

Optically induced dielectrophoretic

PDMS:

Poly(dimethylsiloxane)

Re:

Reynolds number

TGP:

Thermoreversible gelation polymer

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Acknowledgments

The authors would like to thank Dr. Jun Mizuno, Dr. Tetsushi Sekiguchi at Waseda University, Prof. Takashi Funatsu at the University of Tokyo, Dr. Takahiro Arakawa at Tokyo Dental & Medical University, Yoshitaka Shirasaki at Riken, and Dr. Masaki Kanai at Shimadzu Co.

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Authors and Affiliations

  1. Department of Electronic and Photonic Systems, Faculty of Science and Engineering, Waseda University, 3-4-1, Ohkubo, Shinjuku-ku, Tokyo, 169–8555, Japan

    Shuichi Shoji

  2. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2–1, Yamada-Oka, Suita, Osaka, 565–0871, Japan

    Kentaro Kawai

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  1. Shuichi Shoji
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  2. Kentaro Kawai
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Correspondence to Shuichi Shoji .

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Editors and Affiliations

  1. The Chinese Academy of Sciences, Laboratory of Biotechnology, Dalian Institute of Chemical Physics, ZhongShan Road 457, Dalian, 116023, China, People's Republic

    Bingcheng Lin

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Shoji, S., Kawai, K. (2011). Flow Control Methods and Devices in Micrometer Scale Channels. In: Lin, B. (eds) Microfluidics. Topics in Current Chemistry, vol 304. Springer, Berlin, Heidelberg. https://doi.org/10.1007/128_2011_146

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