Abstract
Microfabricated cantilevers have been used in atomic force microscopy for the topography imagingof non-conductive surfaces for more than 20 years. Cantilever beams without tips have proved theirapplicability in recent years as miniaturized, ultrasensitive, and fast-responding sensors for applicationsin chemistry, physics, biochemistry, and medicine. Microcantilever sensors respond by bending dueto the absorption of molecules. A shift in resonance frequency also occurs. They can be operatedin different environments such as gaseous environment, liquids, or vacuum. In gas, microcantileversensors can be operated as an artificial nose, whereby the bending pattern of a microfabricatedarray of eight polymer-coated silicon cantilevers is characteristic of the different vapors from solvents,flavors, and beverages. When operated in a liquid, microcantilever sensors are able to detectbiochemical reactions. Each cantilever is functionalized with a specific biochemical probe receptor,sensitive for detection of the corresponding target molecule. Applications lie in the fields of label-and amplification-free detection of DNA hybridization, the detection of proteins as well as antigen-antibodyreactions, and the detection of larger entities, such as bacteria and fungi.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
Wilfinger RJ, Bardell PH, Chhabra DS (1968) IBM J Res Dev 12:113
Heng TMS (1971) IEEE Trans Microwave Theory Techn 19:652
Petersen KE (1979) IBM J Res Develop 23:376
Kolesar ES (1983) US Patent 4549427
Binnig G, Quate CF, Gerber C (1986) Phys Rev Lett 56:930
Itoh T, Suga T (1994) Appl Phys Lett 64:37
Cleveland JP, Manne S, Bocek D, Hansma PK (1993) Rev Sci Instrum 64:403
Gimzewski JK, Gerber C, Meyer E, Schlittler RR (1994) Chem Phys Lett 217:589
Thundat T, Warmack RJ, Chen GY, Allison DP (1994) Appl Phys Lett 64:2894
Thundat T, Chen GY, Warmack RJ, Allison DP, Wachter EA (1995) Anal Chem 67:519
Lang HP, Berger R, Andreoli C, Brugger J, Despont M, Vettiger P, Gerber C, Gimzewski J, Ramseyer JP, Meyer E, Güntherodt HJ (1998) Appl Phys Lett 72:383
Stoney GG (1909) Proc R Soc London, Ser A 82:172
von Preissig FJ (1989) J Appl Phys 66:4262
Berger R, Lang HP, Gerber C, Gimzewski JK, Fabian JH, Scandella L, Meyer E, Güntherodt HJ (1998) Chem Phys Lett 294:363
Lee C, Itoh T, Ohashi T, Maeda R, Suga T (1997) J Vac Sci Technol B 15:1559
Meyer G, Amer NM (1988) Appl Phys Lett 53:2400
Jeon S, Jung N, Thundat T (2007) Sens Actuators B 122:365
Godin M, Williams PJ, Tabard-Cossa V, Laroche O, Beaulieu LY, Lennox RB, Grutter P (2004) Langmuir 20:7090
Ekinci KL, Roukes ML (2005) Rev Sci Instr 76:061101
Ilic B, Craighead HG, Krylov S, Senaratne W, Ober C, Neuzil P (2004) J Appl Phys 95:3694
Braun T, Barwich V, Ghatkesar MK, Bredekamp AH, Gerber C, Hegner M, Lang HP (2005) Phys Rev E 72:031907
Bachels T, Schäfer R (1999) Chem Phys Lett 300:177
Bachels T, Tiefenbacher F, Schäfer R (1999) J Chem Phys 110:10008
Barnes JR, Stephenson RJ, Welland ME, Gerber C, Gimzewski JK (1994) Nature 372:79
Tabard-Cossa V, Godin M, Burgess IJ, Monga T, Lennox RB, Grutter P (2007) Anal Chem 79:8136
Baller MK, Lang HP, Fritz J, Gerber C, Gimzewski JK, Drechsler U, Rothuizen H, Despont M, Vettiger P, Battiston FM, Ramseyer JP, Fornaro P, Meyer E, Güntherodt HJ (2000) Ultramicroscopy 82:1
Fritz J, Baller MK, Lang HP, Strunz T, Meyer E, Güntherodt HJ, Delamarche E, Gerber C, Gimzewski JK (2000) Langmuir 16:9694
Fritz J, Baller MK, Lang HP, Rothuizen H, Vettiger P, Meyer E, Güntherodt HJ, Gerber C, Gimzewski JK (2000) Science 288:316
McKendry R, Zhang J, Arntz Y, Strunz T, Hegner M, Lang HP, Baller MK, Certa U, Meyer E, Güntherodt HJ, Gerber C (2002) Proc Natl Acad Sci USA 99:9783
Zhang J, Lang HP, Huber F, Bietsch A, Grange W, Certa U, McKendry R, Güntherodt HJ, Hegner M, Gerber C (2006) Nat Nanotechn 1:214
Arntz Y, Seelig JD, Lang HP, Zhang J, Hunziker P, Ramseyer JP, Meyer E, Hegner M, Gerber C (2003) Nanotechnology 14:86
Backmann N, Zahnd C, Huber F, Bietsch A, Plückthun A, Lang HP, Güntherodt HJ, Hegner M, Gerber C (2005) Proc Natl Acad Sci USA 102:14587
Bietsch A, Hegner M, Lang HP, Gerber C (2004) Langmuir 20:5119
Bietsch A, Zhang J, Hegner M, Lang HP, Gerber C (2004) Nanotechnology 15:873
Lange D, Hagleitner C, Hierlemann A, Brand O, Baltes H (2002) Anal Chem 74:3084
Savran CA, Burg TP, Fritz J, Manalis SR (2003) Appl Phys Lett 83:1659
Taurino AM, Distante C, Siciliano P, Vasanelli L (2003) Sens Actuators B 93:117
Ewing RG, Miller CJ (2001) Field Anal Chem Technol 5:215
Garroway AN, Buess ML, Miller JB, Suits BH, Hibbs AD, Barrall GA, Matthews R, Burnett LJ (2001) IEEE Trans Geosci Remote Sens 39:1108
O’Sullivan CK, Guilbault GG (1999) Biosens Bioelectron 14:663
Cunningham B, Weinberg M, Pepper J, Clapp C, Bousquet R, Hugh B, Kant R, Daly C, Hauser E (2001) Sens Actuators B 73:112
Grate JW (2000) Chem Rev 100:2627 (Washington, DC)
Datskos PG, Sepaniak MJ, Tipple CA, Lavrik N (2001) Sens Actuators B 76:393
Pinnaduwage LA, Boiadjiev V, Hawk JE, Thundat T (2003) Appl Phys Lett 83:1471
Muralidharan G, Wig A, Pinnaduwage LA, Hedden D, Thundat T, Lareau RT (2003) Ultramicroscopy 97:433
Pinnaduwage LA, Yi D, Tian F, Thundat T, Lareau RT (2004) Langmuir 20:2690
Pinnaduwage LA, Wig A, Hedden DL, Gehl A, Yi D, Thundat T, Lareau RT (2004) J Appl Phys 95:5871
Pinnaduwage LA, Thundat T, Gehl A, Wilson SD, Hedden DL, Lareau RT (2004) Ultramicroscopy 100:211
Pinnaduwage LA, Gehl A, Hedden DL, Muralidharan G, Thundat T, Lareau RT, Sulchek T, Manning L, Rogers B, Jones M, Adams JD (2003) Nature 425:474
Pinnaduwage LA, Thundat T, Hawk JE, Hedden DL, Britt R, Houser EJ, Stepnowski S, McGill RA, Bubb D (2004) Sens Actuators B 99:223
Voiculescu I, Zaghloul ME, McGill RA, Houser EJ, Fedder GK (2005) IEEE Sensors J 5:641
Pinnaduwage LA, Ji HF, Thundat T (2005) IEEE Sensors J 5:774
Majumdar A (2002) Disease Markers 18:167
Lavrik NV, Sepaniak MJ, Datskos PG (2004) Rev Sci Instrum 75:2229
Ziegler C (2004) Anal Bioanal Chem 379:946
Hansen KM, Thundat T (2005) Methods 37:57
Carrascosa LG, Moreno M, Alvarez M, Lechuga LM (2005) TRAC-Trends Anal Chem 25:196
Yan XD, Ji HF, Thundat T (2006) Curr Anal Chem 2:297
Tang YJ, Fang J, Yan XD, Ji HF (2004) Sens Actuators B 97:109
Forsen E, Nilsson SG, Carlberg P, Abadal G, Perez-Murano F, Esteve J, Montserrat J, Figueras E, Campabadal F, Verd J, Montelius L, Barniol N, Boisen A (2004) Nanotechnology 15:S628
McFarland AW, Poggi MA, Bottomley LA, Colton JS (2004) Rev Sci Instrum 75:2756
Rogers B, Manning L, Jones M, Sulchek T, Murray K, Beneschott B, Adams JD, Hu Z, Thundat T, Cavazos H, Minne SC (2003) Rev Sci Instrum 74:4899
Mertens J, Finot E, Nadal MH, Eyraud V, Heintz O, Bourillot E (2004) Sens Actuators B 99:58
Tang YJ, Fang J, Xu XH, Ji HF, Brown GM, Thundat T (2004) Anal Chem 76:2478
Abedinov N, Popov C, Yordanov Z, Ivanov T, Gotszalk T, Grabiec P, Kulisch W, Rangelow IW, Filenko D, Shirshov YJ (2003) Vac Sci Technol B 21:2931
Zhou J, Li P, Zhang S, Huang YP, Yang PY, Bao MH, Ruan G (2003) Microelectron Eng 69:37
Baselt DR, Fruhberger B, Klaassen E, Cemalovic S, Britton Jr. CL, Patel SV, Mlsna TE, McCorkle D, Warmack B (2003) Sens Actuators B 88:120
Fabre A, Finot E, Demoment J, Contreras S (2003) Ultramicroscopy 97:425
Zhang YF, Ji HF, Brown GM, Thundat T (2003) Anal Chem 75:4773
Zhou J, Li P, Zhang S, Long YC, Zhou F, Huang YP, Yang PY, Bao MH (2003) Sens Actuators B 94:337
Lee CY, Lee GB (2003) J Micromech Microeng 13:620
Weeks BL, Camarero J, Noy A, Miller AE, Stanker L, De Yoreo JJ (2003) Scanning 25:297
Yang YM, Ji HF, Thundat T (2003) J Am Chem Soc 125:1124
Gunter RL, Delinger WG, Manygoats K, Kooser A, Porter TL (2003) Sens Actuators A 107:219
Gfeller KY, Nugaeva N, Hegner M (2005) Biosens Bioelectron 21:528
Alvarez M, Calle A, Tamayo J, Lechuga LM, Abad A, Montoya A (2003) Biosens Bioelectron 18:649
Cherian S, Gupta RK, Mullin BC, Thundat T (2003) Biosens Bioelectron 19:411
Adams JD, Parrott G, Bauer C, Sant T, Manning L, Jones M, Rogers B, McCorkle D, Ferrell TL (2003) Appl Phys Lett 83:3428
Quist F, Tabard-Cossa V, Badia A (2003) J Phys Chem B 107:10691
Gunter RL, Zhine R, Delinger WG, Manygoats K, Kooser A, Porter TL (2004) IEEE Sensors J 4:430
Alvarez M, Carrascosa LG, Moreno M, Calle A, Zaballos A, Lechuga LM, Martinez C, Tamayo J (2004) Langmuir 20:9663
Lee JH, Kim TS, Yoon KH (2004) Appl Phys Lett 84:3187
Wu G, Datar RH, Hansen KM, Thundat T, Cote RJ, Majumdar A (2001) Nat Biotechnol 19:856
Kim BH, Mader O, Weimar U, Brock R, Kern DP (2003) J Vac Sci Technol B 21:1472
Saif MTA, Sager CR, Coyer S (2003) Ann Biomed Eng 31:950
Kumar S, Bajpai RP, Bharadwaj LM (2003) IETE Techn Rev 20:361
Zhang YF, Venkatachalan SP, Xu H, Xu XH, Joshi P, Ji HF, Schulte M (2004) Biosens Bioelectron 19:1473
Pei JH, Tian F, Thundat T (2004) Anal Chem 76:292
Khanafer K, Khaled ARA, Vafai K (2004) J Micromech Microeng 14:1328
Yue M, Lin H, Dedrick DE, Satyanarayana S, Majumdar A, Bedekar AS, Jenkins JW, Sundaram S (2004) J Microelectromech Syst 13:290
Shin S, Paik JK, Lee NE, Park JS, Park HD, Lee J (2005) Ferroelectrics 328:59
McFarland AW, Colton JS (2005) J MEMS 14:1375
Amirola J, Rodríguez A, Castaner L, Santos JP, Gutierrez J, Horrillo MC (2005) Sens Actuators B 111:247
Dutta P, Chapman PJ, Datskos PG, Sepaniak MJ (2005) Anal Chem 77:6601
Liu Y, Flood AH, Bonvallett PA, Vignon SA, Northrop BH, Tseng HR, Jeppesen JO, Huang TJ, Brough B, Baller M, Magonov S, Solares SD, Goddard WA, Ho CM, Stoddart JF (2005) J Am Chem Soc 127:9745
Tabard-Cossa V, Godin M, Grutter P, Burgués I, Lennox RB (2005) J Phys Chem B 109:17531
Tabard-Cossa V, Godin M, Beaulieu LY, Grutter P (2005) Sens Actuators B 107:233
Huber F, Hegner M, Gerber C, Güntherodt HJ, Lang HP (2006) Biosens Bioelectron 21:1599
Yan XD, Shi XL, Hill K, Ji HF (2006) Anal Sci 22:205
Yoo KA, Na KH, Joung SR, Nahm BH, Kang CJ, Kim YS (2006) Japn J Appl Phys Pt 1 45:515
Na KH, Kim YS, Kang CJ (2005) Ultramicroscopy 105:223
Senesac LR, Dutta P, Datskos PG, Sepaniak MJ (2006) Anal Chim Acta 558:94
Mukhopadhyay R, Sumbayev VV, Lorentzen M, Kjems J, Andreasen PA, Besenbacher F (2005) Nano Lett 5:2385
Stachowiak JC, Yue M, Castelino K, Chakraborty A, Majumdar A (2006) Langmuir 22:263
Castelino K, Kannan B, Majumdar A (2005) Langmuir 21:1956
Zhang ZX, Li MQ (2005) Progr Biochem Biophys 32:314
Tian F, Hansen KM, Ferrell TL, Thundat T (2005) Anal Chem 77:1601
Lee JH, Hwang KS, Park J, Yoon KH, Yoon DS, Kim TS (2005) Biosens Bioelectron 20:2157
Ghatnekar-Nilsson S, Lindahl J, Dahlin A, Stjernholm T, Jeppesen S, Hook F, Montelius L (2005) Nanotechnology 16:1512
Wig A, Arakawa ET, Passian A, Ferrell TL, Thundat T (2006) Sens Actuators B 114:206
Yan XD, Xu XHK, Ji HF (2005) Anal Chem 77:6197
Alvarez M, Tamayo J, Plaza JA, Zinoviev K, Dominguez C, Lechuga LM (2006) J Appl Phys 99:024910
Khanafer K, Vafai K (2005) Int J Heat Mass Transfer 48:2886
Wright YJ, Kar AK, Kim YW, Scholz C, George MA (2005) Sens Actuators B 107:242
McFarland AW, Colton JS (2005) J Micromech Microeng 15:1060
Rasmussen PA, Grigorov AV, Boisen A (2005) J Micromech Microeng 15:1088
Li SQ, Orona L, Li ZM, Cheng ZY (2006) Appl Phys Lett 88:073507
Adams JD, Rogers B, Manning L, Hu Z, Thundat T, Cavazos H, Minne SC (2005) Sens Actuators A 121:457
Alvarez M, Tamayo J (2005) Sens Actuators B 106:687
Tang YJ, Ji HF (2005) Instr Sci Technol 33:131
Todorovic DM, Bojicic A (2005) J Phys IV 125:459
Sandberg R, Svendsen W, Molhave K, Boisen A (2005) J Micromech Microeng 15:1454
Luo C (2005) J Appl Mech – Transactions of the ASME 72:617
McFarland AW, Poggi MA, Doyle MJ, Bottomley LA, Colton JS (2005) Appl Phys Lett 87:053505
Lochon F, Dufour I, Rebiere D (2005) Sens Actuators B 108:979
Dareing DW, Thundat T, Jeon SM, Nicholson M (2005) J Appl Phys 97:084902
Dareing DW, Thundat T (2005) J Appl Phys 97:043526
Jeon SM, Desikan R, Fang TA, Thundat T (2006) Appl Phys Lett 88:103118
Jazar GN (2006) J Vibration Control 12:139
Lu P, Lee HP, Lu C, O’Shea SJ (2005) Phys Rev B 72:085405
Sheehan PE, Whitman LJ (2005) Nano Lett 5:803
Chang MMC, Cuda G, Bunimovich YL, Gaspari M, Heath JR, Hill HD, Mirkin CA, Nijdam AJ, Terracciano R, Thundat T, Ferrari M (2006) Curr Opin Chem Biol 10:11
Aeschimann L, Meister A, Akiyama T, Chui BW, Niedermann P, Heinzelmann H, De Rooij NF, Staufer U, Vettiger P (2006) Microelectr Eng 83:1698
Yang JL, Despont M, Drechsler U, Hoogenboom BW, Frederix PLTM, Martin S, Engel A, Vettiger P, Hug HJ (2005) Appl Phys Lett 86:134101
Yang J, Ono T, Esashi M (2000) Sens Actuators A 82:102
Author information
Authors and Affiliations
Corresponding authors
Editor information
Rights and permissions
Copyright information
© 2008 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Lang, H.P., Gerber, C. (2008). Microcantilever Sensors. In: Samorì, P. (eds) STM and AFM Studies on (Bio)molecular Systems: Unravelling the Nanoworld. Topics in Current Chemistry, vol 285. Springer, Berlin, Heidelberg. https://doi.org/10.1007/128_2007_28
Download citation
DOI: https://doi.org/10.1007/128_2007_28
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-78394-7
Online ISBN: 978-3-540-78395-4
eBook Packages: Chemistry and Materials ScienceChemistry and Material Science (R0)