A Solid-State 2-D Wind Sensor
This paper describes the industrial realization of a solid-state wind sensor, that is, one without moving parts. The key component of the sensor is a heated silicon chip that is packaged in such a way that it is non-uniformly cooled by the wind. The resulting flow-induced temperature gradient is measured by on-chip temperature sensors. Their output is then digitized and processed by a microprocessor in order to determine both wind speed and direction. For wind speeds between 0.1 and 25m/s, the errors in the computed wind speed and direction are less than 0.5m/s (or±3%) and ±3° respectively.
Keywordsthermal flow sensor sensor systems
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