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Recognition of Plasma-Induced X-Ray Photoelectron Spectroscopy Fault Pattern Using Wavelet and Neural Network

  • Byungwhan Kim
  • Sooyoun Kim
  • Sang Jeen Hong
Conference paper
Part of the Lecture Notes in Computer Science book series (LNCS, volume 3973)

Abstract

To improve device yield and throughput, faults in plasma processing equipment should be quickly and accurately diagnosed. Despite many useful information of ex-situ sensor measurements, their applications to recognize plasma faults have not been investigated. In this study, a new technique to identify fault causes by recognizing X-ray photoelectron spectroscopy (XPS) using neural network and continuous wavelet transformation (CWT). The presented technique was evaluated with the plasma etch data. A total of 17 experiments were conducted for model construction. Model performance was investigated from the perspectives of training error, testing error, and recognition accuracy with respect to various thresholds. CWT-based BPNN models demonstrated a higher prediction accuracy of about 26%. Their advantages over pure XPS-based models were conspicuous in all three measures at small networks.

Keywords

Recognition Accuracy Continuous Wavelet Transformation BPNN Model Fault Symptom Radio Frequency Source 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 2006

Authors and Affiliations

  • Byungwhan Kim
    • 1
  • Sooyoun Kim
    • 1
  • Sang Jeen Hong
    • 2
  1. 1.Department of Electronic EngineeringSejong UniversitySeoulKorea
  2. 2.Department of Electronic EngineeringMyongji UniversityYonginKorea

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