Optimization of a Simulation for 300mm FAB Semiconductor Manufacturing

  • DongSik Park
  • Youngshin Han
  • Chilgee Lee
Part of the Lecture Notes in Computer Science book series (LNCS, volume 3984)


Many processes are composed of Bays with equipments. Most 300mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots between stockers and tools, or between tools within the same bay. Most companies are trying to reduce average cycle time to increase productivity and delivery time. In this paper, we proposed simulation process standardization method in 300mm FAB semiconductor manufacturing process to propose simulation model verification method. Also we tried to prove efficiency of adopting the simulation theory in real production line.


Semiconductor Industry Simulation Theory Wafer Fabrication Manufacturing Execution System Line Automation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.


  1. 1.
    Choi, B.K., Kim, B.H.: MES (manufacturing execution system) architecture for FMS compatible to ERP(enterprise planning system). INT. J. Computer Integrated Manufacturing 15(3), 274–284 (2002)CrossRefGoogle Scholar
  2. 2.
    SEMI E53-1296 Event Reporting, SEMI Standard (2000)Google Scholar
  3. 3.
    Wein, L.M.: On the relationship Between Yield and Cycle time Semiconductor WaferGoogle Scholar
  4. 4.
    Izak, D., John, W.F., Schruben, L.W.: Planning and Scheduling in Japanese Semiconductor Manufacturing. Journal of Manufacturing Systems 13(5), 323–332 (1993)Google Scholar
  5. 5.
    Han, Y., Park, D., Chae, S., Lee, C.: Full fabrication simulation of 300mm wafer focused on AMHS (Automated material handling systems). In: Baik, D.-K. (ed.) AsiaSim 2004. LNCS (LNAI), vol. 3398, pp. 514–520. Springer, Heidelberg (2005)CrossRefGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 2006

Authors and Affiliations

  • DongSik Park
    • 1
  • Youngshin Han
    • 2
  • Chilgee Lee
    • 1
  1. 1.School of Information and Communication EngineeringSungKyunKwan UniversitySuwon,Kyunggi-doS. Korea
  2. 2.Division of Multimedia Sungkyul UniversityAnyang-city, Gyeonggi-doS. Korea

Personalised recommendations