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Requirements of Precursors for MOCVDand ALD of Rare Earth Oxides

  • Helen C. Aspinall
Chapter
Part of the Topics in Applied Physics book series (TAP, volume 106)

Abstract

This Chapter gives an account of the coordination chemistry of precursors for MOCVD and ALD of rare earth oxides. It opens with a brief introduction to the coordination chemistry of the rare earth elements, and then describes the strategies that have been employed to design and synthesize rare earth complexes with reasonable volatility. The chemical requirements of precursors for MOCVD and ALD are outlined, and it is shown that these requirements may be mutually exclusive. Important classes of precursors, including amides, alkoxides, diketonates and organometallics, are surveyed.

Keywords

71.55.-i; 72.80.Sk; 73.20.At; 75.47.Lx; 77.55.+f 

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Authors and Affiliations

  • Helen C. Aspinall
    • 1
  1. 1.Department of Chemistry, Donnan and Robert Robinson LaboratoriesUniversity of LiverpoolLiverpoolUnited Kingdom

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