Abstract
Microfluidic systems enable manipulating fluids in different functional units which are integrated on a microchip. This chapter describes the basics of microfluidics, where physical effects have a different impact compared to macroscopic systems. Furthermore, an overwiew is given on the microfabrication of these systems. The focus lies on clean-room fabrication methods based on photolithography and soft lithography. Finally, an outlook on advanced maskless micro- and nanofabrication methods is given. Special attention is paid to laser structuring processes.
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Klein, AK., Dietzel, A. (2020). A Primer on Microfluidics: From Basic Principles to Microfabrication. In: Bahnemann, J., Grünberger, A. (eds) Microfluidics in Biotechnology. Advances in Biochemical Engineering/Biotechnology, vol 179. Springer, Cham. https://doi.org/10.1007/10_2020_156
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DOI: https://doi.org/10.1007/10_2020_156
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