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Introduction to Nanoscale Science and Technology pp 7–40Cite as

Nanolithography

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Author information

Authors and Affiliations

  1. Department of Electrical and Computer Engineering, University of Virginia, Charlottesville, VA

    L. R. Harriott & R. Hull

  2. Department of Materials Science and Engineering, University of Virginia, Charlottesville, VA

    R. Hull

Authors
  1. L. R. Harriott
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  2. R. Hull
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Editor information

Editors and Affiliations

  1. Department of Physics, University of California, San Diego La Jolla, CA

    Massimiliano Di Ventra

  2. Department of Electrical and Systems Engineering, The University of Pennsylvania, Philadelphia, PA

    Stephane Evoy

  3. Department of Physics, Virginia Polytechnic Institute and State University, Blacksburg, VA

    James R. Heflin Jr.

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Harriott, L.R., Hull, R. (2004). Nanolithography. In: Di Ventra, M., Evoy, S., Heflin, J.R. (eds) Introduction to Nanoscale Science and Technology. Nanostructure Science and Technology. Springer, Boston, MA. https://doi.org/10.1007/1-4020-7757-2_2

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  • DOI: https://doi.org/10.1007/1-4020-7757-2_2

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4020-7720-3

  • Online ISBN: 978-1-4020-7757-9

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