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Nanoelectromechanical Systems

  • Stephane Evoy
  • Martin Duemling
  • Tushar Jaruhar
Part of the Nanostructure Science and Technology book series (NST)

Keywords

Resonant Frequency Mechanical Resonator Single Electron Transistor Beam Resonator NANOELECTROMECHANICAL System 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science + Business Media, Inc. 2004

Authors and Affiliations

  • Stephane Evoy
    • 1
  • Martin Duemling
    • 2
  • Tushar Jaruhar
    • 1
  1. 1.Department of Electrical and Systems EngineeringUniversity of PennsylvaniaPhiladelphia
  2. 2.Technische Universität Hamburg-HarburgGermany

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