Introduction to Integrative Systems

  • Michael Gaitan
Part of the Nanostructure Science and Technology book series (NST)


Silicon Nitride Mask Level Silicon Dioxide Film Silicon Nitride Film Monolithic Integration 
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Copyright information

© Springer Science + Business Media, Inc. 2004

Authors and Affiliations

  • Michael Gaitan
    • 1
  1. 1.National Institute of Standards and TechnologyGaithersburg

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