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References

  1. Feynman, R. P., 1992, There's plenty of room at the bottom (1959), J. Microelectromech. Syst., 1, 60-66.

    Article  Google Scholar 

  2. Feynman, R. P., 1993, Infinitesimal machinery (1983), J. Microelectromech. Syst., 2(1), 4-14.

    Article  MathSciNet  Google Scholar 

  3. Cambridge Intenational Dictionary of English, 1995, Cambridge University Press.

    Google Scholar 

  4. Microcosmos, A Jacques Perrin film by Claude Nuridsany and Marie Perennou (Galatée Films, 1996)

    Google Scholar 

  5. Madou, M., 2002, Fundamentals of Microfabrication: The Science of Miniaturization, 2nd edition, CRC Press, Boca Raton.

    Google Scholar 

  6. Gere, J. M. and Timoshenko, S. P., 1990, Mechanics of Materials, 3rd edition, PWS-KENT Publishing Company, Elsevier Science BV, Amsterdam.

    Google Scholar 

  7. Trimmer, W. S. N., 1989, Microrobots and micromechanical systems, Sensors and Actuators, 19, 267-287.

    Article  Google Scholar 

  8. Mobius, H., Ehrfeld, W., Hessel V. and Richter, Th., 1995, Sensor controlled processes in chemical microreactors, The 8th International Conference on Solid-State Sensors and Actuators, Transducers ’95 and Eurosensors IX, Stockholm, Sweden, June 25-29, 1995, pp. 775-778.

    Google Scholar 

  9. Neagu, C., 1998, A medical microactuator based on an electrochemical principle, Thesis, University of Twente.

    Google Scholar 

  10. Morf, W. E. and de Rooij, N. F., 1996, Performance of amperometric sensors based on multiple microelectrode arrays, Eurosensors X, Leuven, Belgium, September 8-11, 1996.

    Google Scholar 

  11. Roylance, L. M. and Angell, J. B., 1979, A batch-fabricated silicon accelerometer, IEEE Trans. on Electron Devices, ED-26, 1911-1917.

    Article  Google Scholar 

  12. Petersen, K. E., Shartel, A. and Raley, N. F., 1982, Micromechanical accelerometer integrated with MOS detection circuitry, IEEE Trans. Electron Devices, ED-29, 23-27.

    Article  Google Scholar 

  13. Analog Devices, ADXL50: Monolithic accelerometer with signal conditioning, 1996 obsolete datasheet 2044696ADXL50.pdf, www.analog.com..

  14. Bassous, E. and Baran, E. F., 1978, The fabrication of high precision nozzles by the anisotropic etching of (100) silicon, J. Electrochem. Soc., 125, 132.

    Article  Google Scholar 

  15. In-Stat/MDR market overview report IN030601EA, Got MEMS? 2003 Industry overview and forecast.

    Google Scholar 

  16. Yao, J. J., 2000, RF-MEMS from a device perspective, J. Micromech. And Microeng., 10, R9-R38.

    Article  Google Scholar 

  17. van Beek, J. T. M., et al., 2004, High-Q integrated RF passives and RF-MEMS on silicon: Materials, integration and packaging issues for highfrequency devices, Symp. Boston 2003, in P. Muralt, et al. (eds), MRS Fall Meeting, Warrendale, MRS Materials Research Soc., 783, 97-108.

    Google Scholar 

  18. Roozeboom, F., Kemmeren, A., Verhoeven, J., van den Heuvel, F., Kretschman, H. and Frič, T., 2003, High density, low-loss MOS decoupling capacitors integrated in a GSM power amplifier, Procs. Mat. Res. Soc. Symp., 783, 157-162.

    Google Scholar 

  19. Rijks, T. G. S., et al., 2004, MEMS tunable capacitors and switches for RF applications, MIEL 2004, Nis, Serbia, 24th Int. Conf. Microelectronics, Conference Proceedings.

    Google Scholar 

  20. Middelhoek, S. and Audet, S., 1989, Silicon Sensors, Microelectronics and Signal Processing, Academic Press, London.

    Google Scholar 

  21. Bergveld, P., 2003, Thirty years of ISFETOLOGY: What happened in the past 30 years and what may happen in the next 30 years, Sensors and Actuators, B88, 1-20.

    Google Scholar 

  22. van der Schoot, B. H. and Bergveld, P., 1985, An ISFET-based microlitre titrator: Integration of a chemical sensor-actuator system, Sensors and Actuators, 8, 143-151.

    Article  Google Scholar 

  23. Olthuis, W., Langereis, G. and Bergveld, P., 2001, The merits of differential measuring in time and space, Biocybernetics and Biomedical Engineering, 21(3),5-26.

    Google Scholar 

  24. Janata, J., Josowicz, M., Vanýsek, P. and DeVaney, D. M., 1998, Chemical sensors, Anal. Chem., 70, 179R-208R.

    Google Scholar 

  25. Manz, A., Graber, N. and Widmer, H. M., 1990, Miniaturized total chemical analysis systems: A novel concept for chemical sensing, Sensors and Actuators, B1, 244-248.

    Google Scholar 

  26. Laurell, T. and Drott, J., 1995, Silicon wafer integrated enzyme reactors, Biosensors and Bioelectronics, 10, 289-299.

    Article  Google Scholar 

  27. Elwenspoek, M., Lammerink, T. S. J., Miyake, R. and Fluitman, J. H. J., 1994, Towards integrated microliquid handling systems, J. Micromech. Microeng., 4, 227-245.

    Article  Google Scholar 

  28. Harrison, D. J., Manz, A., and Glavina, P. G., 1991, Electroosmotic pumping within a chemical sensor system integrated on silicon, International Conference on Solid-State Sensors and Actuators, 1991, Transducers ’91, June 24-27, 1991, pp. 792-795.

    Google Scholar 

  29. Olthuis, W., Bohm, S., Langereis, G. R. and Bergveld, P., 2000, Selection in system and sensor, in A. Mulchandani and O. A. Sadik (eds), Chemical and Biological Sensors for Environmental Monitoring, ACS Symposium Series 762, Am. Chem. Soc., Chapter 5, pp. 60-85, Oxford University Press, Washington, DC.

    Google Scholar 

  30. http://www.dlp.com, DLP: A Texas Instruments technology.

  31. Paik, P. Pamula, V. K. and Fair, R. B., Rapid droplet mixers for digital microfluidic systems, Lab on a Chip, 3, 253-259.

    Google Scholar 

  32. http://www.ece.duke.edu/Research/microfluidics, Digital microfluidics, Duke University, Durham, NC.

  33. Kuiper, S. and Hendriks, B. H. W., 2004, Variable-focus liquid lens for miniature cameras, Appl. Phys. letters, 85(7), 1128-1130.

    Article  Google Scholar 

  34. Hayes, R. A. and Feenstra, B. J., 2003, Video speed electronic paper based on electrowetting, Nature, 425(25), 383-385.

    Article  Google Scholar 

  35. Special issue on biomedical applications for MEMS and microfluidics, 2004, Proc. IEEE, 92(1), 1-184.

    Google Scholar 

  36. Pedersen, M., Olthuis, W. and Bergveld, P., 1998, An Integrated silicon capacitive microphone with frequency-modulated digital output, Sensors and Actuators, A69, 267-275.

    Google Scholar 

  37. Neumann, Jr., J. J. and Gabriel, K. J., 2002, CMOSMEMS membrane for audio-frequency acoustic actuation, Sensors and Actuators, A95, 175-182.

    Google Scholar 

  38. Klein, U., Mullenborn, M. and Rombach, P., The advent of silicon microphones in high-volume applications, MSTnews 02/1, pp. 40-41.

    Google Scholar 

  39. Dittmar, A., et al., 1995, A multi-sensor system for the non invasive measurement of the activity of the autonomic nervous system, Sensors and Actuators, B27, 461-464.

    Google Scholar 

  40. Langereis, G. R., Olthuis, W. and Bergveld, P., 1999, Using a single structure for three sensor operations and two actuator operations, Sensors and Actuators, B53, 197-203.

    Google Scholar 

  41. Middelhoek, S., 2000, Celebration of the tenth transducer conference: The past, present and future of transducer research and development, Sensors and Actuators, A82, 2-23.

    Google Scholar 

  42. Hippert, M. A., 2004, Board to board interconnects: Innovative new possibilities with MID packages, Procs. 6th International Congress Molded Interconnect Devices, MID 2004, Erlangen, Germany, September 22-23, 2004, pp. 41-47.

    Google Scholar 

  43. Peels, W., van Montfoort, V., Verweg, F. and Weekamp, W., 2004, Integrated display modules in I2 MC-technology: 3D-MID/over-moulding of electronics, Procs. 6th International Congress Molded Interconnect Devices, MID 2004, Erlangen, Germany, September 22-23, 2004, pp. 49-56.

    Google Scholar 

  44. Yazdi, N., et al., 1998, Micromachined inertial sensors, Procs. IEEE, pp. 1640-1659.

    Google Scholar 

  45. http://www.memspi.com, MEMS Precision Instruments.

  46. Keller, C. G. and Howe, R. T., 1995, Nickel-filled Hexsil thermally actuated tweezers, 8th International Conference on Solid-state Sensors and Actuators (Transducers ’95), June 1995, Stockholm, Sweden, pp. 99-102.

    Google Scholar 

  47. http://www.europractice.bosch.com/en/foundry/index.htm, Europractice Surface Micromachining foundry.

  48. Dekker, R., Baltus, P. G. M. and Maas, H. G. R., 2003, Substrate transfer for RF technologies, IEEE Trans. on Electron Dev., 50(3), 747-757.

    Article  Google Scholar 

  49. Dekker, R., et al., 2003, Substrate transfer: Enabling technology for RF applications, Electron Devices Meeting, 2003, IEDM ’03 Technical Digest, IEEE International, December 8-10, 2003, pp. 15.4.1-15.4.4.

    Google Scholar 

  50. Firestone, F. A., 1993, A new analogy between mechanical and electrical systems, J. Acoust. Soc. Amer., 4, 249-267.

    Article  Google Scholar 

  51. Firestone, F. A., 1938, The mobility method for computing the vibrations of linear mechanical and acoustical systems: Mechanical-electrical analogies, J. Appl. Phys., 9, 373-387.

    Article  Google Scholar 

  52. Beranek, L. L., 1954, Acoustics, McGraw-Hill, New York.

    Google Scholar 

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Langereis, G. (2006). Microsystem Technology for Ambient Intelligence. In: Mukherjee, S., Aarts, R.M., Roovers, R., Widdershoven, F., Ouwerkerk, M. (eds) AmIware Hardware Technology Drivers of Ambient Intelligence. Philips Research, vol 5. Springer, Dordrecht. https://doi.org/10.1007/1-4020-4198-5_9

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