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The Modification of Tribological Properties of Diamond Like Coatings (DLCs) Obtained by Graphite Sputtering in Argon and Nitrogen Ions Presence

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Innovative Superhard Materials and Sustainable Coatings for Advanced Manufacturing

Part of the book series: NATO Science Series II: Mathematics, Physics and Chemistry ((NAII,volume 200))

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Abstract

The tribological properties of internal stresses σ 0 , film microhardness H f , friction coefficient f of DLCs obtained by vacuum sputtering of carbon target under different nitrogen and argon pressure in the chamber were measured. It was established that the argon dosing during film deposition does not affect on the DLCs tribological properties. The nitrogen presence during films deposition in vacuum chamber decreases f and so σ 0 and H f .

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Author information

Authors and Affiliations

  1. Institute of Metal Physics, Ural Division, Russian Academy of sciences, S.Kovalevskaya St.18, Ekaterinburg, Russia

    I.Sh. Trakhtenberg, V.A. Yugov, A.B. Vladimirov, A.P. Rubstein, V.B. Vykhodets, T.E. Kurennykh & E.G. Volkova

Authors
  1. I.Sh. Trakhtenberg
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  2. V.A. Yugov
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  3. A.B. Vladimirov
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  4. A.P. Rubstein
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  5. V.B. Vykhodets
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  6. T.E. Kurennykh
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  7. E.G. Volkova
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Editor information

Editors and Affiliations

  1. NSF Center for Intelligent Maintenance Systems, University of Wisconsin at Milwaukee, WI, USA

    Jay Lee

  2. Institute for Superhard Materials, National Academy of Sciences of Ukraine, Kiev, Ukraine

    Nikolay Novikov  & Vladimir Turkevich  & 

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© 2005 Springer

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Trakhtenberg, I. et al. (2005). The Modification of Tribological Properties of Diamond Like Coatings (DLCs) Obtained by Graphite Sputtering in Argon and Nitrogen Ions Presence. In: Lee, J., Novikov, N., Turkevich, V. (eds) Innovative Superhard Materials and Sustainable Coatings for Advanced Manufacturing. NATO Science Series II: Mathematics, Physics and Chemistry, vol 200. Springer, Dordrecht. https://doi.org/10.1007/1-4020-3471-7_36

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