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© 2006 Springer
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(2006). Silicon bulk micromachining with TMAH. In: Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration. Springer, Boston, MA. https://doi.org/10.1007/0-387-28843-0_2
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DOI: https://doi.org/10.1007/0-387-28843-0_2
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-28842-0
Online ISBN: 978-0-387-28843-7
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