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Techniques in Electrostatics Analysis of MEMS and Their Applications

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Book cover MEMS/NEMS

Abstract

In the computational arena, researchers strive continuously to improve numerical simulations, both in terms of accuracy and efficiency. The needs for better performance in numerical simulations are forever in demands, as their roles in the design and development of new products become more important. This demand is further promoted by the rapid increases in the size of the problems people are solving.

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Author information

Authors and Affiliations

  1. Institute of High Performance Computing, 1 Science Park Road, #01-01 The Capricorn, Singapore Science Park II, Singapore, 117528

    E. T. Ong & H. P. Lee

  2. Department of Mechanical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore, 119260

    K. M. Lim

Authors
  1. E. T. Ong
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  2. K. M. Lim
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  3. H. P. Lee
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Editor information

Editors and Affiliations

  1. University of California, Los Angeles, USA

    Cornelius T. Leondes

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Ong, E.T., Lim, K.M., Lee, H.P. (2006). Techniques in Electrostatics Analysis of MEMS and Their Applications. In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_8

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