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Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications

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MEMS/NEMS

Abstract

As microfabrication technologies mature, the use of microsensors to detect acceleration, pressure, fluid flow and angular rate variation is becoming increasingly common. These sensors find widespread application in the chemical, electronic, automobile, and biomedical fields, and throughout the scientific community in general. Recent market studies have predicted an enormous surge in demand for these sensors in the coming years. In fact, estimates of microsensor market volumes predict worldwide sales of US$50 billion in 2008 (Intechno Consulting, 1999).

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Authors and Affiliations

  1. Department of Mechanical and Automation Engineering, Da-Yeh University, Changhua, Taiwan, 515

    Chia-Yen Lee

  2. Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-sen University, Kaohsiung, Taiwan, 804

    Che-Hsin Lin

  3. Graduate Institute of Materials Engineering, National Pingtung University of Science and Technology, Pingtung, Taiwan, 912

    Lung-Ming Fu

Authors
  1. Chia-Yen Lee
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  2. Che-Hsin Lin
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  3. Lung-Ming Fu
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Editor information

Editors and Affiliations

  1. University of California, Los Angeles, USA

    Cornelius T. Leondes

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© 2006 Springer Science+Business Media, Inc.

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Lee, CY., Lin, CH., Fu, LM. (2006). Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications. In: Leondes, C.T. (eds) MEMS/NEMS. Springer, Boston, MA. https://doi.org/10.1007/0-387-25786-1_27

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